Patents by Inventor Satyadev Patel

Satyadev Patel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9261696
    Abstract: The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.
    Type: Grant
    Filed: April 8, 2014
    Date of Patent: February 16, 2016
    Assignee: TEXAS INSTURMENTS INCORPORATED
    Inventors: Satyadev Patel, Andrew G. Huibers, Peter Richards, Terry Tarn, Dietrich Dehlinger
  • Publication number: 20140299653
    Abstract: The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.
    Type: Application
    Filed: April 8, 2014
    Publication date: October 9, 2014
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Satyadev Patel, Andrew G. Huibers, Peter Richards, Terry Tarn, Dietrich Dehlinger
  • Patent number: 8693082
    Abstract: The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.
    Type: Grant
    Filed: August 10, 2010
    Date of Patent: April 8, 2014
    Assignee: Texas Instruments Incorporated
    Inventors: Satyadev Patel, Andrew G. Huibers, Peter Richards, Terry Tarn, Dietrich Dehlinger
  • Publication number: 20100302618
    Abstract: The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.
    Type: Application
    Filed: August 10, 2010
    Publication date: December 2, 2010
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Satyadev Patel, Andrew G. Huibers, Peter Richards, Terry Tarn, Dietrich Dehlinger
  • Patent number: 7787170
    Abstract: The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.
    Type: Grant
    Filed: June 15, 2004
    Date of Patent: August 31, 2010
    Assignee: Texas Instruments Incorporated
    Inventors: Satyadev Patel, Andrew G. Huibers, Peter Richards, Terry Tarn, Dietrich Dehlinger
  • Patent number: 7751114
    Abstract: Disclosed herein are a system and apparatus for operating a device that comprises an array of micromirrors. The system and apparatus are usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation can be applied independently to the micromirrors. Alternatively, the reparation can be incorporated with a bias inversion process.
    Type: Grant
    Filed: July 6, 2007
    Date of Patent: July 6, 2010
    Assignee: Texas Instruments Incorporated
    Inventors: Satyadev Patel, James Dunphy, Peter Richards, Michel Combes
  • Patent number: 7697193
    Abstract: A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the mirror plate is operable to rotate along a rotation axis that is parallel to but offset from a diagonal of the mirror plate when viewed from the top. An imaginary line connecting the two posts is not parallel to either diagonal of the mirror plate.
    Type: Grant
    Filed: September 11, 2007
    Date of Patent: April 13, 2010
    Assignee: Texas Instruments Incorporated
    Inventors: Andrew Huibers, Satyadev Patel
  • Patent number: 7630085
    Abstract: The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.
    Type: Grant
    Filed: April 19, 2005
    Date of Patent: December 8, 2009
    Assignee: Texas Instruments Incorporated
    Inventors: Regis Grasser, Satyadev Patel, Andrew Huibers
  • Publication number: 20090190825
    Abstract: The invention provides a method and apparatus for evaluating the product quality and performances of micromirror array devices through measurements of the electromechanical responses of the individual micromirrors to the driving forces of electric fields. The electromechanical responses of the micromirrors according to the present invention are described in terms of the rotational angles associated with the operational states, such as the ON and OFF state angles of the ON and OFF state when the micromirror array device is operated in the binary-state mode, and the response speed (i.e. the time interval required for a micromirror device to transit form one state to another) of the individual micromirrors to the driving fields.
    Type: Application
    Filed: January 26, 2009
    Publication date: July 30, 2009
    Applicant: Texas Instruments Incorporated
    Inventors: Igor Volfman, Andrew Huibers, Satyadev Patel, Peter Richards, Leonid Frenkel, Jim Dunphy, Regis Grasser, Greg Schaadt
  • Patent number: 7557932
    Abstract: The invention provides a method and apparatus for evaluating the quality of microelectromechanical devices having deformable and deflectable members using resonation techniques. Specifically, product quality characterized in terms of uniformity of the deformable and deflectable elements is inspected with an optical resonance mapping mechanism on a wafer-level.
    Type: Grant
    Filed: April 19, 2005
    Date of Patent: July 7, 2009
    Assignee: Texas Instruments Incorporated
    Inventors: Jonathan Doan, Regis Grasser, Satyadev Patel, Andrew Huibers, Igor Volfman
  • Patent number: 7498648
    Abstract: A projection system is disclosed herein. The projection system employs a spatial light modulator comprising an array of individually addressable pixels for modulating the incident light based on image data. The modulated light is projected on a screen for viewing.
    Type: Grant
    Filed: January 12, 2006
    Date of Patent: March 3, 2009
    Assignee: Texas Instruments Incorporated
    Inventors: Peter Richards, Andrew Huibers, Satyadev Patel
  • Patent number: 7483198
    Abstract: Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
    Type: Grant
    Filed: February 11, 2005
    Date of Patent: January 27, 2009
    Assignee: Texas Instruments Incorporated
    Inventors: Jonathan Doan, Andrew Huibers, Satyadev Patel, James Dunphy, Dmitri Simonian, Hongqin Shi, Jianglong Zhang
  • Patent number: 7483126
    Abstract: The invention provides a method and apparatus for evaluating the product quality and performances of micromirror array devices through measurements of the electromechanical responses of the individual micromirrors to the driving forces of electric fields. The electromechanical responses of the micromirrors according to the present invention are described in terms of the rotational angles associated with the operational states, such as the ON and OFF state angles of the ON and OFF state when the micromirror array device is operated in the binary-state mode, and the response speed (i.e. the time interval required for a micromirror device to transit form one state to another) of the individual micromirrors to the driving fields.
    Type: Grant
    Filed: June 23, 2004
    Date of Patent: January 27, 2009
    Assignee: Texas Instruments Incorporated
    Inventors: Igor Volfman, Andrew Huibers, Satyadev Patel, Peter Richards, Leonid Frenkel, Jim Dunphy, Regis Grasser, Greg Schaadt
  • Patent number: 7459402
    Abstract: To protect the structural layers from being eroded in the etching process, a protection layer is deposited on the exposed structural layers of the micromirror. The protection layer is deposited before etching and removed after etching.
    Type: Grant
    Filed: May 24, 2005
    Date of Patent: December 2, 2008
    Assignee: Texas Instruments Incorporated
    Inventors: Jonathan Doan, Satyadev Patel, Peter Heureux
  • Patent number: 7459333
    Abstract: A projection system is disclosed herein. The projection system employs a spatial light modulator comprising an array of individually addressable pixels for modulating the incident light based on image data. The modulated light is projected on a screen for viewing.
    Type: Grant
    Filed: January 12, 2006
    Date of Patent: December 2, 2008
    Assignee: Texas Instruments Incorporated
    Inventors: Peter Richards, Andrew Huibers, Satyadev Patel
  • Patent number: 7436572
    Abstract: A spatial light modulator is disclosed, along with methods for making such a modulator. The spatial light modulator comprises an array of micromirrors each having a hinge and a micromirror plate held via a hinge on a substrate, the micromirror plate being attached to the hinge such that the micromirror plate can rotate along a rotation axis and the hinge structure is located between the micromirror plate and the light source. The mirror plate is formed between the hinge and the substrate on which the hinge is formed. As a result, the hinge is exposed to the incident light during the operation.
    Type: Grant
    Filed: August 25, 2004
    Date of Patent: October 14, 2008
    Assignee: Texas Instruments Incorporated
    Inventors: Andrew Huibers, Satyadev Patel
  • Publication number: 20080218842
    Abstract: Disclosed herein is method of operating a device that comprises an array of micromirrors. The method comprises a process usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation process applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation process can be applied independently to the micromirrors. Alternatively, the reparation process can be incorporated with a bias inversion process.
    Type: Application
    Filed: April 15, 2008
    Publication date: September 11, 2008
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Satyadev Patel, James Dumphy, Peter Richards, Michel Combes
  • Patent number: 7411717
    Abstract: A spatial light modulator comprises an array of micromirror devices each of which has a reflective and deflectable mirror plates. The mirror plates are moved between an ON and OFF state during operation, wherein the OFF state is a state wherein the mirror plate is not parallel to the substrate on which the mirror plate is formed. The micromirror device may have an ON state stopper for limiting the rotation of the mirror plate at the ON state angle, but does not have an OFF state stopper. The non-zero OFF state is achieved by attaching the mirror plate to a deformable hinge held by a hinge support that is curved at the natural resting state.
    Type: Grant
    Filed: October 21, 2005
    Date of Patent: August 12, 2008
    Assignee: Texas Instruments Incorporated
    Inventors: Satyadev Patel, Andrew Huibers
  • Patent number: 7394140
    Abstract: Disclosed herein is a micromirror array device that comprises an array of reflective deflectable mirror plates each being associated with one single addressing electrode to be deflected to an ON state angle. A light transmissive electrode is disposed proximate to the mirror plates for deflecting the mirror plates to a non-zero OFF angle. The mirror plates are arranged in the array with a center-to-centre distance of 10.17 microns or less.
    Type: Grant
    Filed: April 19, 2005
    Date of Patent: July 1, 2008
    Assignee: Texas Instruments Incorporated
    Inventors: Satyadev Patel, Andrew Huibers, Chris Spindt, Peter H Heureux
  • Patent number: 7375873
    Abstract: Disclosed herein is method of operating a device that comprises an array of micromirrors. The method comprises a process usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation process applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation process can be applied independently to the micromirrors. Alternatively, the reparation process can be incorporated with a bias inversion process.
    Type: Grant
    Filed: February 28, 2005
    Date of Patent: May 20, 2008
    Assignee: Texas Instruments Incorporated
    Inventors: Satyadev Patel, James Dunphy, Peter Richards, Michel Combes