Patents by Inventor Satyasrayan Kumaraswamy

Satyasrayan Kumaraswamy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for chemical mechanical planarization
    Patent number: 7048607
    Abstract: Generally, a method and apparatus for processing a substrate. In one embodiment, the method provides a first relative motion between at least a first substrate and a polishing material. A second relative motion is provided between at least a second substrate and the polishing material. The changing in direction of the relative motion extends the interval between conditioning procedures used to return the polishing material to a state that produces uniform polishing results.
    Type: Grant
    Filed: May 31, 2000
    Date of Patent: May 23, 2006
    Assignee: Applied Materials
    Inventors: Li Wu, Sourabh Mishra, Young J. Paik, Satyasrayan Kumaraswamy, Robert Lum, Chiu Chan, David Groechel