Patents by Inventor Sayuki YOSHIDA

Sayuki YOSHIDA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Alumina sintered body and manufacturing method therefor
    Patent number: 11760694
    Abstract: The present invention relates to an alumina sintered body and a manufacturing method therefor; for example, the present invention relates to an alumina sintered body that is suitably utilized for a member or similar used in a plasma processing device, an etcher for semiconductor/liquid crystal display device manufacturing, a CVD device, or similar, or that is suitably utilized for a substrate or similar of a plasma-resistant member which is to be coated, as well as a manufacturing method for said alumina sintered body.
    Type: Grant
    Filed: October 2, 2018
    Date of Patent: September 19, 2023
    Assignee: CoorsTek KK
    Inventors: Sayuki Yoshida, Yukihisa Miyashita
  • ALUMINA SINTERED BODY AND MANUFACTURING METHOD THEREFOR
    Publication number: 20200270179
    Abstract: The present invention relates to an alumina sintered body and a manufacturing method therefor; for example, the present invention relates to an alumina sintered body that is suitably utilized for a member or similar used in a plasma processing device, an etcher for semiconductor/liquid crystal display device manufacturing, a CVD device, or similar, or that is suitably utilized for a substrate or similar of a plasma-resistant member which is to be coated, as well as a manufacturing method for said alumina sintered body.
    Type: Application
    Filed: October 2, 2018
    Publication date: August 27, 2020
    Inventors: Sayuki YOSHIDA, Yukihisa MIYASHITA