Patents by Inventor Scot Petitt

Scot Petitt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6190037
    Abstract: The present invention provides an apparatus and method for measuring the temperature of a moving radiant object. A probe, such as a pyrometer, is disposed in an opening of a vacuum chamber adjacent a radiation transparent window. The probe defines an optical path which intercepts the radiant object entering or exiting a processing chamber. The radiant object is moved through the optical path and emits electromagnetic waves. The electromagnetic waves are collected by the probe and transmitted to a signal processing unit where the waves are detected and converted to a temperature reading. If desired, the accumulated data may then be used to generate a cooling curve representing the thermal effects experienced by the radiant object. Extrapolation or correlation methods may be used to extend the cooling curve to points in time prior to or after the data collected by the probe.
    Type: Grant
    Filed: February 19, 1999
    Date of Patent: February 20, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Ashok Das, Nety Krishna, Marc Schweitzer, Nalin Patadia, Wei Yang, Umesh Kelkar, Vijay Parkhe, Scot Petitt, Nitin Khurana