Patents by Inventor Scott A. Hogenson

Scott A. Hogenson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor
    Patent number: 8048328
    Abstract: Methods for rotating a magnetic field in a process chamber is provided herein. In one embodiment, a method for rotating a magnetic field in a process chamber includes forming a magnetic field having a primary shape; changing the primary shape to at least two sequential transitional shapes; and changing the transitional shape to a rotated primary shape. Optionally, the magnetic field may be maintained at an approximately constant magnitude throughout each step. Optionally, a maximum of one current applied to one or more magnetic field producing coils is equal to zero or has its polarity reversed between any two adjacent steps.
    Type: Grant
    Filed: December 18, 2006
    Date of Patent: November 1, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Roger A. Lindley, Scott A. Hogenson, Daniel J. Hoffman
  • Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor
    Patent number: 7883633
    Abstract: Methods for rotating a magnetic field in a process chamber is provided herein. In one embodiment, a method for rotating a magnetic field in a process chamber includes forming a magnetic field having a primary shape; changing the primary shape to at least two sequential transitional shapes; and changing the transitional shape to a rotated primary shape. Optionally, the magnetic field may be maintained at an approximately constant magnitude throughout each step. Optionally, a maximum of one current applied to one or more magnetic field producing coils is equal to zero or has its polarity reversed between any two adjacent steps.
    Type: Grant
    Filed: December 18, 2006
    Date of Patent: February 8, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Roger A. Lindley, Scott A. Hogenson, Daniel J. Hoffman
  • METHOD FOR SHAPING A MAGNETIC FIELD IN A MAGNETIC FIELD-ENHANCED PLASMA REACTOR
    Publication number: 20070113980
    Abstract: Methods for rotating a magnetic field in a process chamber is provided herein. In one embodiment, a method for rotating a magnetic field in a process chamber includes forming a magnetic field having a primary shape; changing the primary shape to at least two sequential transitional shapes; and changing the transitional shape to a rotated primary shape. Optionally, the magnetic field may be maintained at an approximately constant magnitude throughout each step. Optionally, a maximum of one current applied to one or more magnetic field producing coils is equal to zero or has its polarity reversed between any two adjacent steps.
    Type: Application
    Filed: December 18, 2006
    Publication date: May 24, 2007
    Applicant: Applied Materials, Inc.
    Inventors: Roger Lindley, Scott Hogenson, Daniel Hoffman
  • METHOD FOR SHAPING A MAGNETIC FIELD IN A MAGNETIC FIELD-ENHANCED PLASMA REACTOR
    Publication number: 20070108042
    Abstract: Methods for rotating a magnetic field in a process chamber is provided herein. In one embodiment, a method for rotating a magnetic field in a process chamber includes forming a magnetic field having a primary shape; changing the primary shape to at least two sequential transitional shapes; and changing the transitional shape to a rotated primary shape. Optionally, the magnetic field may be maintained at an approximately constant magnitude throughout each step. Optionally, a maximum of one current applied to one or more magnetic field producing coils is equal to zero or has its polarity reversed between any two adjacent steps.
    Type: Application
    Filed: December 18, 2006
    Publication date: May 17, 2007
    Applicant: Applied Materials, Inc.
    Inventors: Scott Hogenson, Roger Lindley, Daniel Hoffman