Patents by Inventor Scott A. Morgan

Scott A. Morgan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for prevention of autodoping of epitaxial layers
    Patent number: 4662956
    Abstract: A method for the prevention of dopant diffusion from the back side of a doped semiconductor substrate during epitaxial layer growth. The entire surface of the substrate is first covered with a cleanly etchable material. Around the entire first layer is formed a second dopant diffusion barrier layer. The front sides of the layers are then selectively etched away to expose the front side of the substrate upon which the epitaxial layer will be grown without contamination of dopant diffusion from the sealed back side of the substrate.
    Type: Grant
    Filed: April 1, 1985
    Date of Patent: May 5, 1987
    Assignee: Motorola, Inc.
    Inventors: Scott S. Roth, Joe Steinberg, H. Scott Morgan