Patents by Inventor Scott Allyn Kolda

Scott Allyn Kolda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF FORMING A TRENCH ISOLATION STRUCTURE USING A SION LAYER
    Publication number: 20150087135
    Abstract: A moat, which is a region of a semiconductor wafer that is laterally surrounded by a trench isolation structure, is protected from damage due to dishing or low spots that result from chemical-mechanical polishing by forming a patterned hard mask structure with an upper silicon oxynitride layer, and performing the polishing with a slurry that includes ceria.
    Type: Application
    Filed: September 6, 2014
    Publication date: March 26, 2015
    Applicant: Texas Instruments Incorporated
    Inventors: Yaojian Leng, Scott Allyn Kolda