Patents by Inventor Scott Beherrell

Scott Beherrell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Induction heated chemical vapor deposition reactor
    Patent number: 6368404
    Abstract: A chemical vapor deposition reactor includes a pancake type induction heating device to achieve operating temperature within the reactor chamber. By design of the susceptor, the induction magnetic force created at the top surface of the susceptor is insufficient to effect levitation of the wafer carrier during epitaxial deposition at high temperatures in the order of about 1500-1800° C.
    Type: Grant
    Filed: April 23, 1999
    Date of Patent: April 9, 2002
    Assignee: Emcore Corporation
    Inventors: Alexander I. Gurary, Paul Thomas Fabiano, David Russell Voorhees, Scott Beherrell
  • Wafer carrier with flexible wafer flat holder
    Patent number: 5840124
    Abstract: Apparatus for mounting wafers in an epitaxial reactor is disclosed. The apparatus includes a wafer carrier for holding the wafer during the epitaxial deposition, including a depressed region for the wafer, and a positioning wire located in the depressed region to maintain the position of the wafer without interfering with the epitaxial deposition process itself.
    Type: Grant
    Filed: June 30, 1997
    Date of Patent: November 24, 1998
    Assignee: Emcore Corporation
    Inventors: Alexander I. Gurary, Scott Beherrell, Vadim Boguslavskiy
  • CVD reactor for uniform heating with radiant heating filaments
    Patent number: 5759281
    Abstract: Apparatus for the growth of epitaxial layers is disclosed. The apparatus includes a wafer carrier mounted within a growth chamber, a reactant inlet for introducing a reactant into the chamber, and a heating element mounted within the chamber for heating wafers mounted on the wafer carrier. The heating element is mounted in a manner which permits unrestricted thermal expansion of the heating element therein.
    Type: Grant
    Filed: June 30, 1997
    Date of Patent: June 2, 1998
    Assignee: Emcore Corporation
    Inventors: Alexander I. Gurary, Scott Beherrell, Vadim Boguslavskiy