Patents by Inventor Scott C. Woods

Scott C. Woods has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Large area source for uniform electron beam generation
    Patent number: 6831284
    Abstract: An electron beam apparatus that includes a vacuum chamber, a large-area cathode disposed in the vacuum chamber, and a first power supply connected to the cathode. The first power supply is configured to apply a negative voltage to the cathode sufficient to cause the cathode to emit electrons toward a substrate disposed in the vacuum chamber. The electron beam apparatus further includes an anode positioned between the large-area cathode and the substrate. The anode is made from aluminum. The electron beam apparatus further includes a second power supply connected to the anode, wherein the second power supply is configured to apply a voltage to the anode that is positive relative to the voltage applied to the cathode.
    Type: Grant
    Filed: November 21, 2002
    Date of Patent: December 14, 2004
    Assignee: Applied Materials, Inc.
    Inventors: Alexandros T. Demos, Hari K. Ponnekanti, Jun Zhao, Helen R. Armer, William R. Livesay, Scott C. Woods
  • Large area source for uniform electron beam generation
    Publication number: 20040099817
    Abstract: An electron beam apparatus that includes a vacuum chamber, a large-area cathode disposed in the vacuum chamber, and a first power supply connected to the cathode. The first power supply is configured to apply a negative voltage to the cathode sufficient to cause the cathode to emit electrons toward a substrate disposed in the vacuum chamber. The electron beam apparatus further includes an anode positioned between the large-area cathode and the substrate. The anode is made from aluminum. The electron beam apparatus further includes a second power supply connected to the anode, wherein the second power supply is configured to apply a voltage to the anode that is positive relative to the voltage applied to the cathode.
    Type: Application
    Filed: November 21, 2002
    Publication date: May 27, 2004
    Inventors: Alexandros T. Demos, Hari K. Ponnekanti, Jun Zhao, Helen R. Armer, William R. Livesay, Scott C. Woods