Abstract: An electrochromic (EC) device includes a substrate and a plurality of layers formed on the substrate. The plurality of layers includes an active layer that is lithiated for changing a tint of the EC device. The active layer is lithiated using a deposition process that uses one or more lithium (Li) targets. The deposition process provides, on no more than 1.5% of manufactured EC devices, a Li tungsten-oxide deposit area on the substrate that is over-concentrated with Li relative to a surrounding area on the substrate. In some aspects, the EC device may be a component of an EC system that further includes a power supply electrically connected to the EC device and configured to provide a voltage to the EC device for controlling a tint of the EC device.