Patents by Inventor Scott Dickey

Scott Dickey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR PROCESSING HEAT EXCHANGER SYSTEM
    Publication number: 20100051253
    Abstract: A semiconductor fabrication heat exchanger system is provided including two heat exchangers spaced from each other. The first heat exchanger receives a high temperature fluid heated from a semiconductor processing tool or the like and the second heat exchanger has a second fluid with a set temperature significantly lower than the heated fluid of the first heat exchanger. A variable and controllable fan removes heat from the heated fluid and the second heat exchanger cools the heated air.
    Type: Application
    Filed: September 2, 2009
    Publication date: March 4, 2010
    Inventor: Scott Dickey