Abstract: A faceplate of a showerhead has a bottom side that faces a plasma generation region and a top side that faces a plenum into which a process gas is supplied during operation of a substrate processing system. The faceplate includes apertures formed through the bottom side and openings formed through the top side. Each of the apertures is formed to extend through a portion of an overall thickness of the faceplate to intersect with at least one of the openings to form a corresponding flow path for process gas through the faceplate. Each of the apertures has a cross-section that has a hollow cathode discharge suppression dimension in at least one direction. Each of the openings has a cross-section that has a smallest cross-sectional dimension that is greater than the hollow cathode discharge suppression dimension.

Abstract: The present invention provides a system and method for actively manipulating fluid flow over a surface using synthetic pulsators. Synthetic pulsators produce pulsed jet operable to manipulate the primary fluid flow proximate to the synthetic pulsator. The synthetic pulsator includes a synthetic jet actuator(s) operable to produce an oscillatory flow, and fluidic jet(s) operable to provide a continuous fluid flow. The oscillatory flow of the synthetic jet(s) and the continuous fluid flow of the fluidic jet(s) combine or mix to produce the pulsed jet operable to manipulate the primary fluid flow. These synthetic pulsators may then be actively manipulated to control the flow behavior of the ducted fluid flow, influence the inception point and trajectory of flow field vortices within the fluid flow, and reduce flow separation within the primary fluid flow.

Abstract: The present invention provides a system and method for actively manipulating fluid flow over a surface using synthetic pulsators. Synthetic pulsators produce pulsed jet operable to manipulate the primary fluid flow proximate to the synthetic pulsator. The synthetic pulsator includes a synthetic jet actuator(s) operable to produce an oscillatory flow, and fluidic jet(s) operable to provide a continuous fluid flow. The oscillatory flow of the synthetic jet(s) and the continuous fluid flow of the fluidic jet(s) combine or mix to produce the pulsed jet operable to manipulate the primary fluid flow. These synthetic pulsators may then be actively manipulated to control the flow behavior of the ducted fluid flow, influence the inception point and trajectory of flow field vortices within the fluid flow, and reduce flow separation within the primary fluid flow.