Patents by Inventor Scott Douglas McClelland

Scott Douglas McClelland has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Magnetically coupled linear servo-drive mechanism
    Patent number: 6712907
    Abstract: The mechanism comprises a magnetically coupled drive mechanism for transporting semiconductor wafers in a semiconductor wafer processing system. The mechanism includes an actuator within a cylinder that contains a set of magnets that drive a complementary set of magnets inside a carriage along a linear path. The carriage is limited to linear motion via a linear ball slide. The magnets in the actuator and carriage are magnetically coupled in such a way as to prevent angular rotation of the magnets within the actuator. Accordingly, driving elements in the actuator can be moved via rotation of a ball screw shaft coupled to a ball nut affixed to the actuator magnets.
    Type: Grant
    Filed: June 21, 2001
    Date of Patent: March 30, 2004
    Assignee: Novellus Systems, Inc.
    Inventors: Thomas M. Pratt, Scott Douglas McClelland, Craig L. Stevens, Kerry Hopkins