Abstract: Long-term facility maintenance may be more efficient when data from multiple sources are combined onto an easily navigable display. In particular, building model data from a three-dimensional computer assisted design (CAD) file may be combined with maintenance information from a computerized maintenance management system (CMMS) and other data sources such as user's manuals and repair guides. The combined data may be accessible through a three-dimensional display of the building on a mobile device. The mobile device allows a user to navigate through the building and select components to view additional maintenance information for the selected components. The display may interact with location sensing devices, such as GPS, in the mobile device to automatically display model data near the user's location. Additionally, a user may modify component information on the mobile device, which is transmitted to the CMMS to update the stored component information.

Abstract: Long-term facility maintenance may be more efficient when data from multiple sources are combined onto an easily navigable display. In particular, building model data from a three-dimensional computer assisted design (CAD) file may be combined with maintenance information from a computerized maintenance management system (CMMS) and other data sources such as user's manuals and repair guides. The combined data may be accessible through a three-dimensional display of the building on a mobile device. The mobile device allows a user to navigate through the building and select components to view additional maintenance information for the selected components. The display may interact with location sensing devices, such as GPS, in the mobile device to automatically display model data near the user's location. Additionally, a user may modify component information on the mobile device, which is transmitted to the CMMS to update the stored component information.

Abstract: A system for delivering a liquid phase precursor fluid into a process chamber as a vapor phase fluid at constant pressure, the system comprising: a vaporizer for vaporizing the liquid phase precursor fluid prior to injecting the vapor phase fluid precursor into the process chamber, and a controllable device for transporting a preselected volume of the liquid phase fluid precursor from a reservoir to the vaporizer responsive to the pressure at the outlet of the vaporizer prior to entering the process chamber where the transport device is operated as the pressure at the outlet of the vaporizer canister drops, whereby system pressure perturbances are minimized prior to entering the process chamber.

Abstract: A system for delivering a liquid phase precursor fluid into a process chamber as a vapor phase fluid at constant pressure, the system comprising: a vaporizer for vaporizing the liquid phase precursor fluid prior to injecting the vapor phase fluid precursor into the process chamber, and a controllable device for transporting a preselected volume of the liquid phase fluid precursor from a reservoir to the vaporizer responsive to the pressure at the outlet of the vaporizer prior to entering the process chamber where the transport device is operated as the pressure at the outlet of the vaporizer canister drops, whereby system pressure perturbances are minimized prior to entering the process chamber.