Abstract: Methods and apparatus for bonding chiplets to substrates are provided herein. In some embodiments, a multi-chamber processing tool for processing substrates, includes: a first equipment front end module (EFEM) having one or more loadports for receiving one or more types of substrates, a second EFEM having one or more loadports; and a plurality of atmospheric modular mainframes (AMMs) coupled to each other and having a first AMM coupled to the first EFEM and a last AMM coupled to the second EFEM, wherein each of the plurality of AMMs include a transfer chamber and one or more process chambers coupled to the transfer chamber, wherein the transfer chamber includes a buffer, and wherein the transfer chamber includes a transfer robot, the one or more process chambers, and a buffer disposed in an adjacent AMM of the plurality of AMMs.

Abstract: Methods and apparatus bonding chiplets to substrates are provided herein. In some embodiments, a multi-chamber processing tool for processing a substrate includes: an equipment front end module (EFEM) having one or more loadports for receiving one or more types of substrates; and a plurality of automation modules coupled to each other and having a first automation module coupled to the EFEM, wherein each of the plurality of automation modules include a transfer chamber and one or more process chambers coupled to the transfer chamber, wherein the transfer chamber includes a buffer configured to hold a plurality of the one or more types of substrates, and wherein the transfer chamber includes a transfer robot configured to transfer the one or more types of substrates between the buffer, the one or more process chambers, and a buffer disposed in an adjacent automation module of the plurality of automation modules.

Abstract: Embodiments of equipment front end modules (EFEMs) are provided herein. In some embodiments, an EFEM includes: two or more loadports for receiving two or more types of substrates; an overhead storage unit having a plurality of storage shelves disposed above the two or more loadports and configured to hold two or more types of front opening unified pods (FOUPs) of different sizes that store the two or more types of substrates, respectively, wherein a horizontal alley is disposed between the plurality of storage shelves and the two or more loadports to provide a horizontal passageway for the FOUPs during transport to the two or more loadports; and an overhead transport system having a pair of vertical actuators disposed on opposite sides of the overhead storage unit and configured to transport FOUPs from the overhead storage unit to the two or more loadports.

Abstract: Methods and apparatus bonding chiplets to substrates are provided herein. In some embodiments, a multi-chamber processing tool for processing a substrate includes: an equipment front end module (EFEM) having one or more loadports for receiving one or more types of substrates; and a plurality of automation modules coupled to each other and having a first automation module coupled to the EFEM, wherein each of the plurality of automation modules include a transfer chamber and one or more process chambers coupled to the transfer chamber, wherein the transfer chamber includes a buffer configured to hold a plurality of the one or more types of substrates, and wherein the transfer chamber includes a transfer robot configured to transfer the one or more types of substrates between the buffer, the one or more process chambers, and a buffer disposed in an adjacent automation module of the plurality of automation modules.

Abstract: Methods and apparatus for bonding chiplets to substrates are provided herein. In some embodiments, a multi-chamber processing tool for processing substrates, includes: a first equipment front end module (EFEM) having one or more loadports for receiving one or more types of substrates, a second EFEM having one or more loadports; and a plurality of atmospheric modular mainframes (AMMs) coupled to each other and having a first AMM coupled to the first EFEM and a last AMM coupled to the second EFEM, wherein each of the plurality of AMMs include a transfer chamber and one or more process chambers coupled to the transfer chamber, wherein the transfer chamber includes a buffer, and wherein the transfer chamber includes a transfer robot, the one or more process chambers, and a buffer disposed in an adjacent AMM of the plurality of AMMs.

Abstract: A multifunctional base for a router is provided to allow precise and repeatable cuts through the use of a set of adjustable fences, template guides and bushings. The base has reference surfaces to allow precision cuts at set distances from a fence or template.

Abstract: A method and system for reducing leakage of hydraulic oil from a hydraulic outlet on a tractor, which involves removal of the female quick connect coupler from a legacy original equipment selective control valve and inserting into the void the following: a three part insert with a front stepped diameter segment, a back section, which is screwed into front stepped diameter segment, a sleeve which is configured to be inserted after a front O-ring is adjusted and a leading portion of a retention bolt.

Abstract: A method and system for reducing leakage of hydraulic oil from a hydraulic outlet on a tractor, which involves removal of the female quick connect coupler from a legacy original equipment selective control valve and inserting into the void the following: a three part insert with a front stepped diameter segment, a back section, which is screwed into front stepped diameter segment, a sleeve which is configured to be inserted after a front O-ring is adjusted and a leading portion of a retention bolt.

Abstract: A method and system for reducing leakage of hydraulic oil from a hydraulic outlet on a tractor, which involves removal of the female quick connect coupler from a legacy original equipment selective control valve and inserting into the void the following: a three part insert with a front stepped diameter segment, a back section, which is screwed into front stepped diameter segment, a sleeve which is configured to be inserted after a front O-ring is adjusted and a leading portion of a retention bolt.

Abstract: A method and system for reducing leakage of hydraulic oil from a hydraulic outlet on a tractor, which involves removal of the female quick connect coupler from a legacy original equipment selective control valve and inserting into the void the following: a three part insert with a front stepped diameter segment, a back section, which is screwed into front stepped diameter segment, a sleeve which is configured to be inserted after a front O-ring is adjusted and a leading portion of a retention bolt.

Abstract: A multifunctional base for a router is provided to allow precise and repeatable cuts through the use of a set of adjustable fences, template guides and bushings. The base has reference surfaces to allow precision cuts at set distances from a fence or template.

Abstract: A method and system for reducing leakage of hydraulic oil from a hydraulic outlet on a tractor, which involves removal of the female quick connect coupler from a legacy original equipment selective control valve and inserting into the void the following: a three part insert with a front stepped diameter segment, a back section, which is screwed into front stepped diameter segment, a sleeve which is configured to be inserted after a front O-ring is adjusted and a leading portion of a retention bolt.

Abstract: This invention provides for a new design of recreational water boards that are significantly more stable than traditional boards in the class of standup paddle boards, windsurfing boards, and surf boards. Higher stability is achieved by shifting the primary buoyancy of the board to the “rail hulls” located on each side of the board deck creating a tunnel-hull effect. This provides a unique ability to make the board more stable for the average or beginner rider. This new design is intended to be a multipurpose platform allowing the rider to use as a standup paddle board, windsurf board, and surf board. In addition because the design is very stable it can be configured with a removable seat to allow the rider to paddle while seated. The increased stability provided by the tunnel hull effect also eliminates the need for a fixed rudder or fin to generate directional stability.

Abstract: A lightweight, small size, high sensitivity gauge for indirectly measuring displacement or absolute gap width by measuring axial strain in an orthogonal direction to the displacement/gap width. The gap gauge includes a preferably titanium base having a central tension bar with springs connecting opposite ends of the tension bar to a pair of end connector bars, and an elongated bow spring connected to the end connector bars with a middle section bowed away from the base to define a gap. The bow spring is capable of producing an axial strain in the base proportional to a displacement of the middle section in a direction orthogonal to the base. And a strain sensor, such as a Fabry-Perot interferometer strain sensor, is connected to measure the axial strain in the base, so that the displacement of the middle section may be indirectly determined from the measurement of the axial strain in the base.