Abstract: The present disclosure relates to a substrate that includes a substrate body and a resonator integrated within the substrate body. The resonator includes a resonator body, a top resonator plate, and a bottom resonator plate. The resonator body extends through the substrate body from a top surface to a bottom surface of the substrate body, and is formed of at least one of a dielectric material and a magnetic material. The top resonator plate is coupled to a top side of the resonator body and resides over the top surface of the substrate body, and the bottom resonator plate is coupled to a bottom side of the resonator body and resides over the bottom surface of the substrate body. The top resonator plate and the bottom resonator plate are electrically conductive.

Abstract: A Bulk Acoustic Wave (BAW) filter includes a series branch coupled between an input node and an output node. The series branch has multiple BAW resonators that are coupled in series, wherein a first series resonator is coupled between a first node and a second node in the series branch. A first shunt resonator is coupled between the first node and a fixed voltage node, such as ground, and a second shunt resonator is coupled between the second node and the fixed voltage node. Further, a first inductor is coupled between the first node and the fixed voltage node, and a second inductor is coupled between the second node and the fixed voltage node. The first inductor and the second inductor are magnetically coupled to one another to generate a virtual inductance between the first node and the second node and in parallel with the first series resonator.

Abstract: The present disclosure relates to a substrate that includes a substrate body and a resonator integrated within the substrate body. The resonator includes a resonator body, a top resonator plate, and a bottom resonator plate. The resonator body extends through the substrate body from a top surface to a bottom surface of the substrate body, and is formed of at least one of a dielectric material and a magnetic material. The top resonator plate is coupled to a top side of the resonator body and resides over the top surface of the substrate body, and the bottom resonator plate is coupled to a bottom side of the resonator body and resides over the bottom surface of the substrate body. The top resonator plate and the bottom resonator plate are electrically conductive.

Abstract: A Bulk Acoustic Wave (BAW) filter includes a series branch coupled between an input node and an output node. The series branch has multiple BAW resonators that are coupled in series, wherein a first series resonator is coupled between a first node and a second node in the series branch. A first shunt resonator is coupled between the first node and a fixed voltage node, such as ground, and a second shunt resonator is coupled between the second node and the fixed voltage node. Further, a first inductor is coupled between the first node and the fixed voltage node, and a second inductor is coupled between the second node and the fixed voltage node. The first inductor and the second inductor are magnetically coupled to one another to generate a virtual inductance between the first node and the second node and in parallel with the first series resonator.