Patents by Inventor Scott PRENGLE

Scott PRENGLE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE SUPPORT DEVICE, THERMAL PROCESSING APPARATUS, SUBSTRATE SUPPORT METHOD, AND THERMAL PROCESSING METHOD
    Publication number: 20230253237
    Abstract: A substrate support device relating to technology disclosed in the description of the present application includes: a holding plate for opposing a substrate bowable by being heated by irradiation with flash light; and a plurality of substrate support pins provided on the holding plate and being for supporting the substrate, wherein the plurality of substrate support pins are arranged at locations where a volume of a space between the holding plate and the substrate in an unbowed state and a volume of a space between the holding plate and the substrate in a bowed state are equal to each other. Breakage of the substrate can be suppressed in a case where the substrate is bowed by flash light.
    Type: Application
    Filed: April 10, 2023
    Publication date: August 10, 2023
    Inventor: Scott PRENGLE
  • Substrate support device, thermal processing apparatus, substrate support method, and thermal processing method
    Patent number: 11694920
    Abstract: A substrate support device relating to technology disclosed in the description of the present application includes: a holding plate for opposing a substrate bowable by being heated by irradiation with flash light; and a plurality of substrate support pins provided on the holding plate and being for supporting the substrate, wherein the plurality of substrate support pins are arranged at locations where a volume of a space between the holding plate and the substrate in an unbowed state and a volume of a space between the holding plate and the substrate in a bowed state are equal to each other. Breakage of the substrate can be suppressed in a case where the substrate is bowed by flash light.
    Type: Grant
    Filed: October 26, 2020
    Date of Patent: July 4, 2023
    Assignee: SCREEN Holdings Co., Ltd.
    Inventor: Scott Prengle
  • SUBSTRATE SUPPORT DEVICE, THERMAL PROCESSING APPARATUS, SUBSTRATE SUPPORT METHOD, AND THERMAL PROCESSING METHOD
    Publication number: 20210159111
    Abstract: A substrate support device relating to technology disclosed in the description of the present application includes: a holding plate for opposing a substrate bowable by being heated by irradiation with flash light; and a plurality of substrate support pins provided on the holding plate and being for supporting the substrate, wherein the plurality of substrate support pins are arranged at locations where a volume of a space between the holding plate and the substrate in an unbowed state and a volume of a space between the holding plate and the substrate in a bowed state are equal to each other. Breakage of the substrate can be suppressed in a case where the substrate is bowed by flash light.
    Type: Application
    Filed: October 26, 2020
    Publication date: May 27, 2021
    Inventor: Scott PRENGLE