Abstract: An apparatus for making a multi-layer capacitive device may include a deposition chamber and a conductive material source within the deposition chamber. The apparatus may also include a dielectric material source within the deposition chamber and a micro-electromechanical system (MEMS) deposition shadow mask within the deposition chamber. The apparatus may also include a controller outside the deposition chamber and configured to selectively operate the conductive material source and the dielectric material source and operate the MEMS deposition shadow mask adjacent a substrate within the deposition chamber to selectively deposit alternating conductive material and dielectric material layers onto the substrate to make the multi-layer capacitive device.

Abstract: A sensing system may include a microelectromechanical system (MEMS) device that may include a MEMS substrate having a resonator cavity formed therein, at least one MEMS resonator beam carried by the MEMS substrate within the resonator cavity, and a diamond layer carried by the substrate above the resonator cavity. The diamond layer may include at least one nitrogen vacancy center (NVC) aligned with the at least one MEMS resonator beam. A resonator drive circuit may be coupled to drive the at least one MEMS resonator beam. A sensing circuit may be associated with the at least one nitrogen vacancy center to infer small changes in a magnetic field acceleration from phase perturbations in local magnetic field resonance.

Abstract: A sensing system may include a sensor substrate and a plurality of diamond pillars on the sensor substrate in an irregular arrangement. Each diamond pillar may include at least one nitrogen vacancy center (NVC) and a respective pair of input and output optical waveguides coupled to each diamond pillar. At least some of the pillars may have different heights, and different height shims may be coupled between the sensor substrate and adjacent portions of the corresponding input and output optical waveguides.

Abstract: A sensing system may include a microelectromechanical system (MEMS) device that may include a MEMS substrate having a resonator cavity formed therein, at least one MEMS resonator beam carried by the MEMS substrate within the resonator cavity, and a diamond layer carried by the substrate above the resonator cavity. The diamond layer may include at least one nitrogen vacancy center (NVC) aligned with the at least one MEMS resonator beam. A resonator drive circuit may be coupled to drive the at least one MEMS resonator beam. A sensing circuit may be associated with the at least one nitrogen vacancy center to infer small changes in a magnetic field acceleration from phase perturbations in local magnetic field resonance.

Abstract: A MEMS unpowered pressure sensor device including a substrate, a flexible membrane operatively connected to the substrate, and a cantilever beam operatively connected to the substrate and suspended over the flexible membrane. The flexible membrane is configured to deform towards the cantilever beam upon pressure applied such that the deformed flexible membrane makes contact with the cantilever beam. The device may include a plurality of bond pads arranged around the flexible membrane. Each of the plurality of bond pads may include its own cantilever beam forming an array of a plurality of cantilever beams. The plurality of cantilever beams includes beams of different lengths. The device may include at least one bond pad on the substrate and over the flexible membrane. The cantilever beam may extend from at least one bond pad. The flexible membrane may deform in a substantially dome shape.

Abstract: An apparatus used in a fuze device, which includes a MEMS micro-rotor. The micro-rotor of the apparatus may move an explosive material, for example, a fuze material, from an out-of-line position to an in-line position. The micro-rotor includes an integral cavity in which the material may be safely loaded and held in the out-of-line position. At an appropriate time, the fuze device of a fully assembled ordnance may be armed. When the apparatus is activated, the micro-rotor carefully moves the explosive material to the in-line position, where the ordnance is armed.