Patents by Inventor Scott S. Kellogg

Scott S. Kellogg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for removing particles from a semiconductor processing tool
    Patent number: 6786222
    Abstract: A method for removing particles from a semiconductor processing tool is provided. The method comprises providing a pick-up wafer for picking up particles from a semiconductor processing tool, inserting said pick-up wafer into said semiconductor processing tool and placing the pick-up wafer on a receiving member, applying an electrostatic charge to said pick-up wafer, leaving said pick-up wafer in said semiconductor processing tool for a predetermined dwell time; and removing said pick-up wafer from said semiconductor processing tool. Further, a method for processing semiconductor wafers is provided.
    Type: Grant
    Filed: October 25, 2002
    Date of Patent: September 7, 2004
    Assignee: Motorola, Inc.
    Inventors: Larry E. Frisa, Scott S. Kellogg, Grant W. McEwan, Michael N. Montgomery, Iraj Eric Shahvandi
  • Method for removing particles from a semiconductor processing tool
    Publication number: 20040079385
    Abstract: A method for removing particles from a semiconductor processing tool is provided. The method comprises providing a pick-up wafer for picking up particles from a semiconductor processing tool, inserting said pick-up wafer into said semiconductor processing tool and placing the pick-up wafer on a receiving member, applying an electrostatic charge to said pick-up wafer, leaving said pick-up wafer in said semiconductor processing tool for a predetermined dwell time; and removing said pick-up wafer from said semiconductor processing tool. Further, a method for processing semiconductor wafers is provided.
    Type: Application
    Filed: October 25, 2002
    Publication date: April 29, 2004
    Inventors: Larry E. Frisa, Scott S. Kellogg, Grant W. McEwan, Michael N. Montgomery, Iraj Eric Shahvandi