Patents by Inventor Scott T. Barusso

Scott T. Barusso has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Bellows liner for an ion beam implanter
    Patent number: 7205556
    Abstract: An ion beam implanter includes ion beam forming and directing apparatus and an implantation station where workpieces are implanted with ions from an ion beam. The beam travels along an evacuated path from an ion source to the implantation station. A flexible bellows couples the implantation station to the beam forming and directing apparatus permitting the implantation station to be pivoted with respect to the beam forming and directing apparatus and thereby change an implantation orientation of the workpieces with respect to the ion beam. A replaceable, flexible bellows liner is disposed within an interior region of the bellows to reduce the volume of implantation byproducts deposited on an interior surface of the bellows.
    Type: Grant
    Filed: October 1, 2004
    Date of Patent: April 17, 2007
    Assignee: Axcelis Technologies, Inc.
    Inventors: Lyudmila Stone, Scott T. Barusso, Dale K. Stone, Alexander S. Perel