Abstract: A process gas supplier includes an outer tube providing a passage for a first process gas, a first inner tube in the outer tube and providing a passage for a second process gas, a gas reactor at an upper part of the outer tube, accommodating a metal source and generating a third process gas by a reaction between the second process gas and the metal source, a second inner tube in the outer tube and providing a passage for the third process gas, a third inner tube in the outer tube and providing a passage for a fourth process gas, a first gas injector supplying the first process gas to a processing space outside the outer tube, a second gas injector supplying the third process gas to the processing space, and a third gas injector supplying the fourth process gas to the processing space.

Abstract: A gas supplying unit for supplying multiple gases includes an outer pipe and at least one inner pipe positioned inside of the outer pipe, wherein a first process gas supplied to the inner pipe is jetted outwardly from the outer pipe through a plurality of first gas jet orifices, and a second process gas supplied to the outer pipe is jetted outwardly from the outer pipe through a plurality of second gas jet orifices.