Patents by Inventor Se Mun Park

Se Mun Park has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PLASMA ETCHING CHAMBER
    Publication number: 20110139371
    Abstract: Disclosed is a plasma etching chamber including a gas distribution plate guiding a reaction gas to the edge of the wafer; a plate disposed to be spaced apart from the gas distribution plate; and bumper portions protruding on at least one of opposite surfaces of the gas distribution plate and the plate to allow the pressure of the reaction gas moving to the edge of the wafer to be uniform.
    Type: Application
    Filed: October 31, 2008
    Publication date: June 16, 2011
    Inventors: Hee-Se Lee, Seong-Hyun Chung, Se Mun Park