Patents by Inventor Se-Won Ko

Se-Won Ko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate carrier
    Patent number: 10790176
    Abstract: A substrate carrier may include a carrier body and a first sensor unit. The carrier body may include an internal space, an inlet port and an outlet port. The internal space may be configured to receive a substrate. A purge gas may be introduced into the internal space through the inlet port. A gas in the internal space may be exhausted through the outlet port. The first sensor unit may be at the outlet port and configured to detect environmental properties of the internal space in real time. Thus, a generation or cause of a contaminant in the carrier body may be accurately identified.
    Type: Grant
    Filed: June 19, 2018
    Date of Patent: September 29, 2020
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Du-Sik Bae, Hang-Ryong Lim, Se-Won Ko, Yoon-Mi Lee, Jin-Ho Kim, Jung-Dae Park, Min-Seon Lee, Yeong-Cheol Lee
  • SUBSTRATE CARRIER
    Publication number: 20190131152
    Abstract: A substrate carrier may include a carrier body and a first sensor unit. The carrier body may include an internal space, an inlet port and an outlet port. The internal space may be configured to receive a substrate. A purge gas may be introduced into the internal space through the inlet port. A gas in the internal space may be exhausted through the outlet port. The first sensor unit may be at the outlet port and configured to detect environmental properties of the internal space in real time. Thus, a generation or cause of a contaminant in the carrier body may be accurately identified.
    Type: Application
    Filed: June 19, 2018
    Publication date: May 2, 2019
    Inventors: Du-Sik Bae, Hang-Ryong Lim, Se-Won Ko, Yoon-Mi Lee, Jin-Ho Kim, Jung-Dae Park, Min-Seon Lee, Yeong-Cheol Lee