Patents by Inventor Se-Youl Oh

Se-Youl Oh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Box cleaner for cleaning wafer shipping box
    Patent number: 7976642
    Abstract: The present invention relates to a box cleaner including an ultrasonic cleaning bath having a receiving space to be filled with DIW and an ultrasonic wave generator arranged at a bottom thereof; a tray for loading a wafer shipping box thereon; a lift for providing a driving force to put the tray into the ultrasonic cleaning bath and take the tray out of the ultrasonic cleaning bath; and a drying system for drying the cleaned shipping box, wherein a gas sprayer is installed in the ultrasonic cleaning bath for spraying gas into the cleaned shipping box to push the DIW out of the shipping box, thereby draining the DIW.
    Type: Grant
    Filed: September 24, 2008
    Date of Patent: July 12, 2011
    Assignee: Siltron, Inc.
    Inventor: Se-Youl Oh
  • BOX CLEANER FOR CLEANING WAFER SHIPPING BOX
    Publication number: 20090084416
    Abstract: The present invention relates to a box cleaner including an ultrasonic cleaning bath having a receiving space to be filled with DIW and an ultrasonic wave generator arranged at a bottom thereof; a tray for loading a wafer shipping box thereon; a lift for providing a driving force to put the tray into the ultrasonic cleaning bath and take the tray out of the ultrasonic cleaning bath; and a drying system for drying the cleaned shipping box, wherein a gas sprayer is installed in the ultrasonic cleaning bath for spraying gas into the cleaned shipping box to push the DIW out of the shipping box, thereby draining the DIW.
    Type: Application
    Filed: September 24, 2008
    Publication date: April 2, 2009
    Applicant: SILTRON INC.
    Inventor: Se-Youl Oh
  • Wafer inspection machine and method
    Publication number: 20080156122
    Abstract: The present invention relates to wafer inspection machine and method. The wafer inspection machine comprises an inspection stage having a first area for unloading an inspected wafer and loading a new wafer to be inspected, and a second area for inspecting a wafer; a plurality of wafer mounting units installed on the inspection stage to face each other; a rotating plate on which a plurality of the wafer mounting units are installed, making a rotation such that each wafer mounting unit is located on the first and second areas in turn; a robot for unloading the inspected wafer from the wafer mounting unit located on the first area and loading a new wafer to be inspected in the wafer mounting unit located on the first area; and a wafer inverting means for inverting the wafer loaded in the wafer mounting unit located on the second area.
    Type: Application
    Filed: December 19, 2007
    Publication date: July 3, 2008
    Applicant: SILTRON INC.
    Inventors: Se Youl Oh, Hyeok Jin Koh