Patents by Inventor Sean A. Casarotti
Sean A. Casarotti has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230287993Abstract: A vacuum valve for high/ultra-high vacuum systems includes a valve housing defining a passage connecting a first and a second opening of the housing. A valve body and a complementary seat is disposed in the passage, the valve body and/or the seat including a seal and the valve body being movable in a linear axial direction along between an open position and a closed position. The valve body cooperates with the seat in the closed position so as to close the first opening gas-tightly. An electromechanical actuation unit for actuating the valve body includes an electric motor and a mechanical conversion unit with an input portion drivingly connected to the motor and an output portion drivingly connected to the valve body. The conversion unit converts a rotational output of the electrical motor into a linear movement of an output portion to move the valve body in the axial direction.Type: ApplicationFiled: March 9, 2022Publication date: September 14, 2023Inventors: Thomas R. HODAPP, Sean A. CASAROTTI, David W. CRONE
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Publication number: 20180266567Abstract: A plate within the valve pivots about a shaft to cause the plate to transition between an open position and a closed position within a bore passing through the housing of the valve. The plate has a perimeter seal thereon which abuts against a tapering seat of the bore when the throttle plate is in a closed orientation. The seal has a curving form over a recess and an energy source, such as the toroidal spring in the recess, to energize the seal and allow it to maintain secure contact against the seat. The shaft is offset from the centerline of the bore and the plate is mounted to the shaft at a location offset from the center point of the plate, so that rotation of the plate causes the plate to swing somewhat into a closed position, minimizing abrasive contact between the seat and seal during closing.Type: ApplicationFiled: July 5, 2017Publication date: September 20, 2018Inventors: Jeff Hadley, Sean Casarotti
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Publication number: 20090194728Abstract: A Wide-body Valve Having an Internalized Actuator is disclosed. The preferred valve provides exceptional conductance while also providing a compact valve and actuator package. The valve incorporates a geometry wherein the internal diameter of the valve is approximately 180% of the diameter of the valve's port. Furthermore, the stroke of the valve is preferably 30% or more of port diameter. Also, the valve actuator housing is designed to cooperate with the valve body housing such that the actuator housing is encapsulated within the valve body housing such that the valve part count and valve part volume is reduced over conventional valves.Type: ApplicationFiled: February 4, 2009Publication date: August 6, 2009Inventors: Evan Pickett, Randy Regennitter, Sean Casarotti, Thomas Deany
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Patent number: 7144056Abstract: An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The end-effector has limiters to restrict the lateral movement of a supported wafer. In one example, the end-effector has a detector for detecting the presence of a wafer. The detector is mounted at a shallow angle to allow the end-effector to be positioned close to a wafer to be picked-up, thereby allowing detection of deformed wafers contained in a wafer cassette. The shallow angle of the detector also minimizes the thickness of the end-effector. Also disclosed is a wafer station with features similar to that of the end-effector.Type: GrantFiled: March 25, 2003Date of Patent: December 5, 2006Assignee: Tru-Si Technologies, Inc.Inventors: Sean A. Casarotti, Alexander J. Berger, Frank E. Kretz
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Patent number: 7104579Abstract: An end effector has one or more vortex chucks to support a wafer, and at least two detectors for detecting different portions of the wafer before the wafer is picked up. If one of the detectors detects a wafer and the other one does not, an alarm is generated to alert an operator that the wafer is possibly cross slotted in the wafer cassette. Each detector includes a light emitter and a light receiver. The light emitter emits a light beam at an angle to a surface defined by an ideally flat wafer when the wafer is supported by the end effector (the actual wafers do not have to be flat). The angle is not more than 45°, and is between 6° and 12° in some embodiments. Other features and embodiments are also provided.Type: GrantFiled: January 12, 2004Date of Patent: September 12, 2006Assignee: Tru-Si Technologies Inc.Inventors: Sean A. Casarotti, Alexander J. Berger, Frank E. Kretz
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Patent number: 7027894Abstract: An article holder has sensors that detect whether an article held in the holder is a workpiece or a piece of packaging material. Examples are end effectors suitable for picking up semiconductor wafers and packaging material from a pod or some other carrier.Type: GrantFiled: September 9, 2003Date of Patent: April 11, 2006Assignee: Tru-Si Technologies, Inc.Inventors: Frank E. Kretz, Alexander J. Berger, Sean A. Casarotti
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Publication number: 20040150237Abstract: An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The end-effector has limiters to restrict the lateral movement of a supported wafer. In one example, the end-effector has a detector for detecting the presence of a wafer. The detector is mounted at a shallow angle to allow the end-effector to be positioned close to a wafer to be picked-up, thereby allowing detection of deformed wafers contained in a wafer cassette. The shallow angle of the detector also minimizes the thickness of the end-effector. Also disclosed is a wafer station with features similar to that of the end-effector.Type: ApplicationFiled: January 12, 2004Publication date: August 5, 2004Inventors: Sean A. Casarotti, Alexander J. Berger, Frank E. Kretz
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Publication number: 20040049318Abstract: An article holder has sensors that detect whether an article held in the holder is a workpiece or a piece of packaging material. Examples are end effectors suitable for picking up semiconductor wafers and packaging material from a pod or some other carrier.Type: ApplicationFiled: September 9, 2003Publication date: March 11, 2004Inventors: Frank E. Kretz, Alexander J. Berger, Sean A. Casarotti
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Patent number: 6688662Abstract: An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The end-effector has limiters to restrict the lateral movement of a supported wafer. In one example, the end-effector has a detector for detecting the presence of a wafer. The detector is mounted at a shallow angle to allow the end-effector to be positioned close to a wafer to be picked-up, thereby allowing detection of deformed wafers contained in a wafer cassette. The shallow angle of the detector also minimizes the thickness of the end-effector. Also disclosed is a wafer station with features similar to that of the end-effector.Type: GrantFiled: April 2, 2002Date of Patent: February 10, 2004Assignee: Tru-Si Technologies, Inc.Inventors: Sean A. Casarotti, Alexander J. Berger, Frank E. Kretz
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Publication number: 20040012214Abstract: An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The end-effector has limiters to restrict the lateral movement of a supported wafer. In one example, the end-effector has a detector for detecting the presence of a wafer. The detector is mounted at a shallow angle to allow the end-effector to be positioned close to a wafer to be picked-up, thereby allowing detection of deformed wafers contained in a wafer cassette. The shallow angle of the detector also minimizes the thickness of the end-effector. Also disclosed is a wafer station with features similar to that of the end-effector.Type: ApplicationFiled: March 25, 2003Publication date: January 22, 2004Inventors: Sean A. Casarotti, Alexander J. Berger, Frank E. Kretz
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Patent number: 6665583Abstract: An article holder has sensors that detect whether an article held in the holder is a workpiece or a piece of packaging material. Examples are end effectors suitable for picking up semiconductor wafers and packaging material from a pod or some other carrier.Type: GrantFiled: October 4, 2002Date of Patent: December 16, 2003Assignee: Tru-Si Technologies, Inc.Inventors: Frank E. Kretz, Alexander J. Berger, Sean A. Casarotti
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Patent number: 6638004Abstract: An article holder has protrusions that contact the article. The friction between the protrusions and the article impedes the article movement relative to the holder yet allows the article to slide when the article is pushed against some object. The article is pushed against the object in order to position the article more precisely.Type: GrantFiled: July 13, 2001Date of Patent: October 28, 2003Assignee: Tru-Si Technologies, Inc.Inventors: Alexander J. Berger, Frank E. Kretz, Sean A. Casarotti
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Patent number: 6631935Abstract: An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The end-effector has limiters to restrict the lateral movement of a supported wafer. In one example, the end-effector has a detector for detecting the presence of a wafer. The detector is mounted at a shallow angle to allow the end-effector to be positioned close to a wafer to be picked-up, thereby allowing detection of deformed wafers contained in a wafer cassette. The shallow angle of the detector also minimizes the thickness of the end-effector. Also disclosed is a wafer station with features similar to that of the end-effector.Type: GrantFiled: August 4, 2000Date of Patent: October 14, 2003Assignee: Tru-Si Technologies, Inc.Inventors: Sean A. Casarotti, Alexander J. Berger, Frank E. Kretz
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Patent number: 6615113Abstract: An article holder has sensors that detect whether an article held in the holder is a workpiece or a piece of packaging material. Examples are end effectors suitable for picking up semiconductor wafers and packaging material from a pod or some other carrier.Type: GrantFiled: July 13, 2001Date of Patent: September 2, 2003Assignee: Tru-Si Technologies, Inc.Inventors: Frank E. Kretz, Alexander J. Berger, Sean A. Casarotti
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Publication number: 20030052495Abstract: An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The end-effector has limiters to restrict the lateral movement of a supported wafer. In one example, the end-effector has a detector for detecting the presence of a wafer. The detector is mounted at a shallow angle to allow the end-effector to be positioned close to a wafer to be picked-up, thereby allowing detection of deformed wafers contained in a wafer cassette. The shallow angle of the detector also minimizes the thickness of the end-effector. Also disclosed is a wafer station with features similar to that of the end-effector.Type: ApplicationFiled: April 2, 2002Publication date: March 20, 2003Inventors: Sean A. Casarotti, Alexander J. Berger, Frank E. Kretz
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Publication number: 20030040837Abstract: An article holder has sensors that detect whether an article held in the holder is a workpiece or a piece of packaging material. Examples are end effectors suitable for picking up semiconductor wafers and packaging material from a pod or some other carrier.Type: ApplicationFiled: October 4, 2002Publication date: February 27, 2003Inventors: Frank E. Kretz, Alexander J. Berger, Sean A. Casarotti
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Publication number: 20030018410Abstract: An article holder has sensors that detect whether an article held in the holder is a workpiece or a piece of packaging material. Examples are end effectors suitable for picking up semiconductor wafers and packaging material from a pod or some other carrier.Type: ApplicationFiled: July 13, 2001Publication date: January 23, 2003Applicant: Tru-Si Technologies, Inc.Inventors: Frank E. Kretz, Alexander J. Berger, Sean A. Casarotti
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Publication number: 20030012638Abstract: An article holder has protrusions that contact the article. The friction between the protrusions and the article impedes the article movement relative to the holder yet allows the article to slide when the article is pushed against some object. The article is pushed against the object in order to position the article more precisely.Type: ApplicationFiled: July 13, 2001Publication date: January 16, 2003Inventors: Alexander J. Berger, Frank E. Kretz, Sean A. Casarotti