Abstract: Various embodiments are generally directed to techniques for splitting fluid flows with porous medium, such as a porous medium with metal particles, for instance. Some embodiments are particularly directed to a flow splitting assembly that creates a differential flow at a calibrated flow split. In one or more embodiments, for example, an apparatus for flow spitting may include a manifold comprising first, second and third manifold openings in fluid communication. In one or more such embodiments, introduction of a flow to the first manifold opening via an inlet filter may cause a differential flow at a calibrated flow split between a first restrictor coupled to the second opening of the manifold and a second restrictor coupled to the third opening of the manifold. In various embodiments, each restrictor may include one or more porous medium composed of metal particles.

Abstract: A method for inspection includes directing a beam of X-rays to impinge upon an area of a sample containing first and second features formed respectively in first and second thin film layers, which are overlaid on a surface of the sample. A pattern of the X-rays diffracted from the first and second features is detected and analyzed in order to assess an alignment of the first and second features.

Abstract: A method for inspection includes directing a beam of X-rays to impinge upon an area of a sample containing first and second features formed respectively in first and second thin film layers, which are overlaid on a surface of the sample. A pattern of the X-rays diffracted from the first and second features is detected and analyzed in order to assess an alignment of the first and second features.