Patents by Inventor Sean Joyce

Sean Joyce has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fluorine based cleaning of an ion source
    Patent number: 7531819
    Abstract: A deposit cleaning system for removing deposits from interior surfaces of ion sources and/or electrodes includes a fluorine source, a throttle mechanism, and a controller. The fluorine source supplies fluorine to the ion source as a cleaning material. The throttle mechanism mitigates loss of fluorine through a source aperture of the ion source by at least partially covering the source aperture. The controller controls the supply and flow rate from the fluorine source to the ion source and also controls the positioning of the throttle mechanism.
    Type: Grant
    Filed: September 29, 2006
    Date of Patent: May 12, 2009
    Assignee: Axcelis Technologies, Inc.
    Inventors: William F. DiVergilio, Daniel R. Tieger, William P. Reynolds, Christopher W. Hodgdon, Sean Joyce
  • Fluorine based cleaning of an ion source
    Publication number: 20070137671
    Abstract: A deposit cleaning system for removing deposits from interior surfaces of ion sources and/or electrodes includes a fluorine source, a throttle mechanism, and a controller. The fluorine source supplies fluorine to the ion source as a cleaning material. The throttle mechanism mitigates loss of fluorine through a source aperture of the ion source by at least partially covering the source aperture. The controller controls the supply and flow rate from the fluorine source to the ion source and also controls the positioning of the throttle mechanism.
    Type: Application
    Filed: September 29, 2006
    Publication date: June 21, 2007
    Inventors: William F. DiVergilio, Daniel R. Tieger, William P. Reynolds, Christopher W. Hodgdon, Sean Joyce