Patents by Inventor Sean Lynes

Sean Lynes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10763144
    Abstract: A method of operating a process control system and a process control system are provided by the disclosure. In one embodiment, the process control system includes: (1) an optical sensor configured to monitor a production process within a process chamber and generate optical data therefrom, (2) an operational controller configured to perform critical functions to determine processing conditions of the production process from the optical data, wherein the critical functions are directed by critical function controls, (3) an adaptable management controller configured to provide the critical function controls to the operational controller, wherein the adaptable management controller is hierarchically isolated from the operational controller during the critical functions.
    Type: Grant
    Filed: March 1, 2018
    Date of Patent: September 1, 2020
    Assignee: Verity Instruments, Inc.
    Inventors: Sean Lynes, Richard J. Daignault, Jr., Zhiyong Gu, Hong Chen
  • Publication number: 20190273007
    Abstract: A method of operating a process control system and a process control system are provided by the disclosure. In one embodiment, the process control system includes: (1) an optical sensor configured to monitor a production process within a process chamber and generate optical data therefrom, (2) an operational controller configured to perform critical functions to determine processing conditions of the production process from the optical data, wherein the critical functions are directed by critical function controls, (3) an adaptable management controller configured to provide the critical function controls to the operational controller, wherein the adaptable management controller is hierarchically isolated from the operational controller during the critical functions.
    Type: Application
    Filed: March 1, 2018
    Publication date: September 5, 2019
    Inventors: Sean Lynes, Richard J. Daignault, JR., Zhiyong Gu, Hong Chen
  • Patent number: 10365212
    Abstract: The disclosure provides an optical calibration device for in-chamber calibration of optical signals associated with a processing chamber, a characterization system for plasma processing chambers, methods of characterizing plasma processing chambers, and a chamber characterizer. In one example, the optical calibration device includes: (1) an enclosure, (2) an optical source located within the enclosure and configured to provide a source light having a continuous spectrum, and (3) optical shaping elements located within the enclosure and configured to form the source light into a calibrating light that approximates a plasma emission during an operation within the processing chamber.
    Type: Grant
    Filed: November 2, 2017
    Date of Patent: July 30, 2019
    Assignee: Verity Instruments, Inc.
    Inventors: Andrew Weeks Kueny, Mike Whelan, Mark Anthony Meloni, John D. Corless, Rick Daignault, Sean Lynes
  • Publication number: 20180136118
    Abstract: The disclosure provides an optical calibration device for in-chamber calibration of optical signals associated with a processing chamber, a characterization system for plasma processing chambers, methods of characterizing plasma processing chambers, and a chamber characterizer. In one example, the optical calibration device includes: (1) an enclosure, (2) an optical source located within the enclosure and configured to provide a source light having a continuous spectrum, and (3) optical shaping elements located within the enclosure and configured to form the source light into a calibrating light that approximates a plasma emission during an operation within the processing chamber.
    Type: Application
    Filed: November 2, 2017
    Publication date: May 17, 2018
    Inventors: Andrew Weeks Kueny, Mike Whelan, Mark Anthony Meloni, John D. Corless, Rick Daignault, Sean Lynes