Abstract: Nanoporous oxygen reduction catalyst material comprising at least 90 collectively Pt, Ni, and Ta. The nanoporous oxygen reduction catalyst material is useful, for example, in fuel cell membrane electrode assemblies.

Abstract: A faceplate of a showerhead has a bottom side that faces a plasma generation region and a top side that faces a plenum into which a process gas is supplied during operation of a substrate processing system. The faceplate includes apertures formed through the bottom side and openings formed through the top side. Each of the apertures is formed to extend through a portion of an overall thickness of the faceplate to intersect with at least one of the openings to form a corresponding flow path for process gas through the faceplate. Each of the apertures has a cross-section that has a hollow cathode discharge suppression dimension in at least one direction. Each of the openings has a cross-section that has a smallest cross-sectional dimension that is greater than the hollow cathode discharge suppression dimension.

Abstract: A cover is provided for a sensor port. The cover includes an open end disposed proximal to the sensor port. The cover further includes a closed end disposed in opposing relation to the open end. The cover further includes a passage laterally defined between the open end and the closed end. The passage is disposed proximal to the open end and is configured to allow fluid communication of the sensor port with atmosphere.