Patents by Inventor Sean Trautman

Sean Trautman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DI water rinse of photoresists with insoluble dye content
    Patent number: 8338082
    Abstract: A method of forming a pattern in a photoresist layer which contains a dye that is insoluble in the developer solution is disclosed. A rinse liquid, typically deionized water, is dispensed onto the substrate while it is rotated at less than 750 rpm. The dye in the exposed regions is carried off by the rinse liquid, and does not accumulate in corners of exposed regions at the edge of the substrate due to centrifugal action.
    Type: Grant
    Filed: March 28, 2008
    Date of Patent: December 25, 2012
    Assignee: Texas Instruments Incorporated
    Inventors: Maciej Blasiak, Sean Trautman, Jerry Schlesinger
  • DI Water Rinse of Photoresists with Insoluble Dye Content
    Publication number: 20090246705
    Abstract: A method of forming a pattern in a photoresist layer which contains a dye that is insoluble in the developer solution is disclosed. A rinse liquid, typically deionized water, is dispensed onto the substrate while it is rotated at less than 750 rpm. The dye in the exposed regions is carried off by the rinse liquid, and does not accumulate in corners of exposed regions at the edge of the substrate due to centrifugal action.
    Type: Application
    Filed: March 28, 2008
    Publication date: October 1, 2009
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Maciej Blasiak, Sean Trautman, Jerry Schlesinger