Patents by Inventor Sean Washburn

Sean Washburn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrode designs for high pressure magnetically assisted inductively coupled plasmas
    Patent number: 5648701
    Abstract: A plasma system is disclosed comprising a vessel suitable for containing a plasma at a pressure of at least about 100 mtorr, a plasma gas in the vessel at a pressure of at least 100 mtorr, an antenna with a substantially planar face positioned adjacent a portion of the vessel for applying an electromagnetic field to the plasma gas to thereby generate and maintain a plasma, and means for applying an external magnetic field to the plasma gas other than the field generated by the antenna, and having a component in a direction substantially perpendicular to the planar face of the antenna.
    Type: Grant
    Filed: June 28, 1994
    Date of Patent: July 15, 1997
    Assignees: The University of North Carolina at Chapel Hill, Kobel Steel USA, Inc.
    Inventors: William M. Hooke, Brian R. Stoner, Steven P. Bozeman, Roy E. Fauber, Tobin L. Munsat, Sean Washburn