Patents by Inventor Sebastiaan Maria Cornelissen

Sebastiaan Maria Cornelissen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Publication number: 20070114451
    Abstract: In an immersion lithographic apparatus, bubble formation in immersion liquid is reduced or prevented by reducing a gap size or area on a substrate table and/or covering the gap.
    Type: Application
    Filed: November 22, 2006
    Publication date: May 24, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Hans Jansen, Sebastiaan Maria Cornelissen, Sjoerd Nicolaas Donders, Roelof De Graaf, Christiaan Hoogendam, Hernes Jacobs, Martinus Hendrikus Leenders, Jeroen Johannes Mertens, Bob Streefkerk, Jan-Gerard Van Der Toorn, Peter Smits, Franciscus Johannes Janssen, Michel Riepen
  • Lithographic apparatus and device manufacturing method
    Publication number: 20050190351
    Abstract: A lithographic projection apparatus in which a reaction force is generated between a balance mass and a substrate table. The balance mass is elastically coupled to the base frame with a suspension eigenfrequency of between 0.3 and 10 Hz.
    Type: Application
    Filed: May 2, 2005
    Publication date: September 1, 2005
    Applicant: ASML Netherlands B.V.
    Inventors: Henrikus Cox, Robertus Nicodemus Van Ballegoij, Petrus Matthijs Vosters, Sven Antoin Hol, Sebastiaan Maria Cornelissen