Patents by Inventor Sebastian BRUECK

Sebastian BRUECK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical grating and optical assembly for same
    Patent number: 10578783
    Abstract: An optical grating (8) includes a substrate (9), on the surface (9a) of which a periodic structure (10) is formed that is embodied to diffract incident radiation (11), in particular incident EUV radiation, with a specified wavelength (??) into a predetermined order of diffraction, in particular into the first order of diffraction (m=+1). The optical grating also has a coating (12) applied onto the periodic structure with at least one layer (13, 14) that is embodied to suppress the diffraction of the incident radiation into at least one higher order of diffraction (m=+2, . . . ) than the predetermined order of diffraction.
    Type: Grant
    Filed: January 3, 2019
    Date of Patent: March 3, 2020
    Assignee: CARL ZEISS SMT GMBH
    Inventors: Sebastian Brueck, Michael Gerhard, Vitaliy Shklover
  • OPTICAL GRATING AND OPTICAL ASSEMBLY FOR SAME
    Publication number: 20190137668
    Abstract: An optical grating (8) includes a substrate (9), on the surface (9a) of which a periodic structure (10) is formed that is embodied to diffract incident radiation (11), in particular incident EUV radiation, with a specified wavelength (??) into a predetermined order of diffraction, in particular into the first order of diffraction (m=+1). The optical grating also has a coating (12) applied onto the periodic structure with at least one layer (13, 14) that is embodied to suppress the diffraction of the incident radiation into at least one higher order of diffraction (m=+2, . . . ) than the predetermined order of diffraction.
    Type: Application
    Filed: January 3, 2019
    Publication date: May 9, 2019
    Inventors: Sebastian BRUECK, Michael GERHARD, Vitaliy SHKLOVER