Patents by Inventor Sebastian FAAS

Sebastian FAAS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240419066
    Abstract: In a method for incorporating temperature-regulating hollow structures into a substrate, in particular into a substrate for an optical element, such as a mirror for an EUV projection exposure apparatus, there are the following steps: (A) providing a substrate; (B) progressively focusing a processing light beam on ablation locations at which temperature-regulating hollow structures are intended to arise; (C) a scanning process is carried out in which the processing light beam is guided with a focus in such a way that an ablation focus is moved along a scanning trajectory; (D) the scanning trajectory comprises a plurality of scanning patterns; (E) the scanning positions are spaced apart from one another in a longitudinal direction of the temperature-regulating hollow structure to be produced; and (F) the scanning trajectory additionally comprises pattern jump paths.
    Type: Application
    Filed: June 14, 2024
    Publication date: December 19, 2024
    Inventors: Uwe BIELKE, Markus DAUTH, Oliver DIER, Sebastian FAAS, Matthias FETZER, Caren GATZEN, Ingo HERMANN, Rudy HUSSEIN, Daniel LENZ, Luca METTENLEITER, Eric MYSLIWITZ, Stefan NOLTE, Ulrich PFLANZ, Benjamin ROSS, Simon RUCK, Andreas SEIFERT, Samer SULEIMAN, Tobias ULLSPERGER, Jonas ZIPFEL
  • Publication number: 20240036345
    Abstract: A method for optical contact bonding components includes: placing a first surface (2a) of a first component (2) onto a second surface (3a) of a second component (3), to form an air film, and pressing the first surface against the second surface for optical contact bonding of the two components. Placing and pressing the first component is carried out by a robot (4). A laminar gas flow (10) is generated between the first and second surfaces with a ventilation device (9). A related apparatus (1) includes: the robot, configured to place the first surface onto the second surface thereby forming an air film. The robot presses the first surface against the second surface, to optically contact bond the first and second components. A holding device (8) holds the second component during the placing and pressing. A ventilation device generates the laminar gas flow between the first and second surfaces.
    Type: Application
    Filed: October 12, 2023
    Publication date: February 1, 2024
    Inventors: Stefan SCHUETTER, Eduard SCHWEIGERT, Benjamin ROSS, Sebastian FAAS