Abstract: A method for aligning a workpiece in a working space of a machine tool having a numerical control system uses a probe. 3D models of the working space, probe, and workpiece are virtually displayed. The workpiece is positioned in the working space and the virtual workpiece is positioned in the virtual working space so that there is an initial coincidence between positions thereof. The probe is manually positioned relative to the workpiece, wherein a planned probing point and probing direction are selected based on a minimum distance of the virtual probe from the virtual workpiece, and are displayed. Enabling of the probing is based on quality of the planned probing point, and, when enabled, a probing operation is triggered, and coordinates of a probing point are determined. The position of the workpiece is recalculated using these coordinates, and the position of the virtual workpiece is updated.

Abstract: A micromechanical inertial sensor and a method for its operation. The micromechanical inertial sensor includes: a sensor element; a substrate having a substrate plane; a detection device for detecting a mechanical deflection due to tilting or deformation of the sensor element about a rotation axis substantially parallel to the substrate plane, wherein the mechanical deflection due to the tilting or deformation takes place along a detection direction substantially perpendicular to the substrate plane, wherein the detection device includes a first electrode structure and a second electrode structure that are firmly anchored to the substrate, wherein the detection device generates a measurement signal from the detected mechanical tilting or deformation of the sensor element about the rotation axis.

Abstract: A micromechanical inertial sensor. The inertial sensor includes a first sensor element for measuring an inertial variable in a first frequency band, and a second sensor element for measuring a periodic acceleration in a second frequency band. The second frequency band is at least partially above the first frequency band.

Abstract: A sample cell including a sample space, restricted on its first side by a first inner side of a first membrane and on its second side by a second inner side of a second membrane. A spacer is arranged between the first and the second inner sides to establish a distance between the membranes. A first retaining element is arranged on a first outer side, facing away from the sample space, of the first membrane and a second retaining element is arranged on a second outer side, which faces away from the sample space, of the second membrane, the first and second retaining elements together form a retaining structure. The first and second retaining elements each have a plurality of apertures aligned with each other in a direction transverse to the flat sides, to form a plurality of examination windows, in which the outer sides of the membranes are exposed.

Abstract: A micromechanical structure, including a substrate, a seismic mass movable with respect to the substrate, and first and second detectors. A first direction and a second direction perpendicular to the first direction define a main extension plane of the substrate. The first and second detectors respectively detect a translatory deflection, and a rotatory deflection. The seismic mass is connected to the substrate via an anchoring element and four torsion spring sections. The first detector include an electrode structure, including first electrodes attached at the seismic mass and second electrodes attached at the substrate. The first and second electrodes have a two-dimensional extension in the second direction and in a third direction perpendicular to the main extension plane. The anchoring element includes first and second sections with a gap between them. A connecting element connects two first electrodes and is guided through the gap.

Abstract: A sample cell including a sample space, restricted on its first side by a first inner side of a first membrane and on its second side by a second inner side of a second membrane. A spacer is arranged between the first and the second inner sides to establish a distance between the membranes. A first retaining element is arranged on a first outer side, facing away from the sample space, of the first membrane and a second retaining element is arranged on a second outer side, which faces away from the sample space, of the second membrane, the first and second retaining elements together form a retaining structure. The first and second retaining elements each have a plurality of apertures aligned with each other in a direction transverse to the flat sides, to form a plurality of examination windows, in which the outer sides of the membranes are exposed.

Abstract: A micromechanical inertial sensor. The inertial sensor includes a first sensor element for measuring an inertial variable in a first frequency band, and a second sensor element for measuring a periodic acceleration in a second frequency band. The second frequency band is at least partially above the first frequency band.

Abstract: A micromechanical structure, including a substrate, a seismic mass movable with respect to the substrate, and first and second detection means. A first direction and a second direction perpendicular to the first direction define a main extension plane of the substrate. The first and second detection means respectively detect a translatory deflection, and a rotatory deflection. The seismic mass is connected to the substrate via an anchoring element and four torsion spring sections. The first detection means include an electrode structure, including first electrodes attached at the seismic mass and second electrodes attached at the substrate. The first and second electrodes have a two-dimensional extension in the second direction and in a third direction perpendicular to the main extension plane. The anchoring element includes first and second sections with a gap between them. A connecting element connects two first electrodes and is guided through the gap.

Abstract: A micromechanical structure for an acceleration sensor includes a movable seismic mass including electrodes, the seismic mass being attached to a substrate with the aid of an attachment element; first fixed counter electrodes attached to a first carrier plate; and second fixed counter electrodes attached to a second carrier plate, where the counter electrodes, together with the electrodes, are situated nested in one another in a sensing plane of the micromechanical structure, and where the carrier plates are situated nested in one another in a plane below the sensing plane, each being attached to a central area of the substrate with the aid of an attachment element.

Abstract: A micromechanical z-acceleration sensor, including a seismic mass element including a torsion spring; the torsion spring including an anchor element, with the aid of which the torsion spring is connected to a substrate; the torsion spring being connected at both ends to the seismic mass element with the aid of a bar-shaped connecting element designed as normal with respect to the torsion spring in the plane of the seismic mass element.

Abstract: A micromechanical component is provided, the micromechanical component enclosing a cavity, the micromechanical component including a sensor element situated in the cavity, and the micromechanical component including a getter situated in the cavity. The micromechanical component includes a structure, situated between the sensor element and the getter, which is designed in such a way that a particle that is desorbed by the getter is sorbed onto and/or into an area of the micromechanical component that is spaced apart from the sensor element.

Abstract: A micromechanical structure for an acceleration sensor includes a movable seismic mass including electrodes, the seismic mass being attached to a substrate with the aid of an attachment element; first fixed counter electrodes attached to a first carrier plate; and second fixed counter electrodes attached to a second carrier plate, where the counter electrodes, together with the electrodes, are situated nested in one another in a sensing plane of the micromechanical structure, and where the carrier plates are situated nested in one another in a plane below the sensing plane, each being attached to a central area of the substrate with the aid of an attachment element.

Abstract: A getter device for a micromechanical component, having a metallic getter structure that is situated in a cavity of the micromechanical component. The getter structure is heatable using a defined electric current. It is possible to evaporate the material of the getter structure in a defined manner.

Abstract: A micromechanical z-acceleration sensor, including a seismic mass element including a torsion spring; the torsion spring including an anchor element, with the aid of which the torsion spring is connected to a substrate; the torsion spring being connected at both ends to the seismic mass element with the aid of a bar-shaped connecting element designed as normal with respect to the torsion spring in the plane of the seismic mass element.

Abstract: A micromechanical component is provided, the micromechanical component enclosing a cavity, the micromechanical component including a sensor element situated in the cavity, and the micromechanical component including a getter situated in the cavity. The micromechanical component includes a structure, situated between the sensor element and the getter, which is designed in such a way that a particle that is desorbed by the getter is sorbed onto and/or into an area of the micromechanical component that is spaced apart from the sensor element.

Abstract: A micromechanical sensor core for an inertial sensor, having a movable seismic mass, a defined number of anchor elements, by which the seismic mass is fastened on a substrate, a defined number of stop devices fastened on the substrate for stopping the seismic mass, a first springy stop element, a second springy stop element and a solid stop element being developed on the stop device. The stop elements are designed in such a way that the seismic mass is able to strike in succession against the first springy stop element, the second springy stop element and the solid stop element.

Abstract: A method for operating a micromechanical z-accelerometer. The method includes applying a test signal to an electrode in order to induce a defined displacement of a rocker of the z-accelerometer during operation of the z-accelerometer; detecting the displacement of the rocker and converting the displacement into an acceleration value; and evaluating the acquired acceleration value by determining a difference between the acquired acceleration value and an initial acceleration value acquired in a manufacturing process, a difference between the acquired acceleration value and the initial acceleration value being compared to a defined threshold value and assessed.

Abstract: A getter device for a micromechanical component, having a metallic getter structure that is situated in a cavity of the micromechanical component. The getter structure is heatable using a defined electric current. It is possible to evaporate the material of the getter structure in a defined manner.

Abstract: A method for manufacturing a micromechanical structure, and a micromechanical structure. The micromechanical structure encompasses a first micromechanical functional layer, made of a first material, that comprises a buried conduit having a first end and a second end; a micromechanical sensor structure having a cap in a second micromechanical functional layer that is disposed above the first micromechanical functional layer; an edge region in the second micromechanical functional layer, such that the edge region surrounds the sensor structure and defines an inner side containing the sensor structure and an outer side facing away from the sensor structure; such that the first end is located on the outer side and the second end on the inner side.

Abstract: A micromechanical acceleration sensor is described which includes a substrate and a seismic mass which is movably situated with respect to the substrate in a detection direction. The micromechanical sensor includes at least one damping device for damping motions of the seismic mass perpendicular to the detection direction.