Patents by Inventor Sebastian Thoma
Sebastian Thoma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11703634Abstract: A mounted hollow-core fiber arrangement includes a hollow-core fiber having a microstructure, and a mount arrangement including a plurality of mounting contacts configured to apply a force to an outer layer of the hollow-core fiber. A portion of the hollow-core fiber is located in a receiving region of the mount arrangement. The plurality of mounting contacts are positioned around the receiving region. The mounting contacts are distributed around the receiving region, the distribution of the mounting contacts corresponding to a distribution of features of the microstructure of the hollow-core fiber. The mounted hollow core fiber can be used in a radiation source apparatus for providing broadband radiation.Type: GrantFiled: June 9, 2022Date of Patent: July 18, 2023Assignee: ASML NETHERLANDS B.V.Inventors: Sebastian Thomas Bauerschmidt, Patrick Sebastian Uebel, Peter Maximilian Götz
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Patent number: 11688992Abstract: A broadband light source device for creating broadband light pulses includes a hollow-core fiber and a pump laser source device. The hollow-core fiber is configured to create the broadband light pulses by an optical non-linear broadening of pump laser pulses. The hollow-core fiber includes a filling gas, an axial hollow light guiding fiber core configured to support core modes of a guided light field, and an inner fiber structure surrounding the fiber core and configured to support transverse wall modes of the guided light field. The pump laser source device is configured to create and provide the pump laser pulses at an input side of the hollow-core fiber. The transverse wall modes include a fundamental transverse wall mode and second and higher order transverse wall modes.Type: GrantFiled: October 21, 2021Date of Patent: June 27, 2023Assignee: Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.Inventors: Patrick Sebastian Uebel, Philip St. J. Russell, Sebastian Thomas Bauerschmidt
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Patent number: 11687009Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.Type: GrantFiled: May 11, 2022Date of Patent: June 27, 2023Assignees: ASML NETHERLANDS B.V., ASML HOLDING N.V.Inventors: Sebastian Thomas Bauerschmidt, Peter Maximilian Götz, Patrick Sebastian Uebel, Ronald Franciscus Herman Hugers, Jan Adrianus Boer, Edwin Johannes Cornelis Bos, Andreas Johannes Antonius Brouns, Vitaliy Prosyentsov, Paul William Scholtes-Van Eijk, Paulus Antonius Andreas Teunissen, Mahesh Upendra Ajgaonkar
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Publication number: 20230146877Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.Type: ApplicationFiled: January 5, 2023Publication date: May 11, 2023Applicant: ASML Netherlands B.V.Inventors: Patrick Sebastian UEBEL, Sebastian Thomas BAUERSCHMIDT, Peter Maximilian GÖTZ
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Patent number: 11640028Abstract: A hollow-core photonic crystal fiber (HC-PCF) (10) for guiding at least one mode of a light field (1) along a mode guiding section (11) of the HC-PCF (10), comprises an outer jacket (12), an inner cladding (13) and a hollow core (14), which extend along the HC-PCF (10), wherein the inner cladding (13) is arranged on an interior surface of the outer jacket (12) and comprises anti-resonant structures (15) surrounding the hollow core (14), and the hollow core (14) has a mode guiding core diameter (d) provided along the mode guiding section of the HC-PCF (10), and wherein at least one fiber end (16) of the HC-PCF (10) has a light field coupling section (17) in which the hollow core (14) is tapered over an axial coupling section length from a fiber end core diameter (D) at the at least one fiber end (16) to the mode guiding core diameter (d). Furthermore, methods of using the HC-PCF and manufacturing the HC-PCF are described.Type: GrantFiled: May 26, 2021Date of Patent: May 2, 2023Assignee: MAX-PLANCK-GESELLSCHAFT ZUR FÖRDERUNG DER WISSENSCHAFTEN E.V.Inventors: Sebastian Thomas Bauerschmidt, Patrick Sebastian Uebel, Philip St. J. Russell
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Patent number: 11629039Abstract: A funnel compatible with recreational vehicle fill ports. The funnel including: a) an input section having an inlet portion which is tapered; b) an output section having: i) an outlet portion in fluid communication with the inlet portion and adapted to engage with a fill port; and ii) an adapter portion not in fluid communication with the input section and adapted to engage with a support member.Type: GrantFiled: March 10, 2021Date of Patent: April 18, 2023Assignee: EMBEDDED STEPS LLCInventors: Edward Terrana, Sebastian Thomas Terrana
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Patent number: 11556044Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.Type: GrantFiled: September 27, 2021Date of Patent: January 17, 2023Assignee: ASML Netherlands B.V.Inventors: Patrick Sebastian Uebel, Sebastian Thomas Bauerschmidt, Peter Maximilian Götz
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Publication number: 20220317368Abstract: A mounted hollow-core fiber arrangement includes a hollow-core fiber having a microstructure, and a mount arrangement including a plurality of mounting contacts configured to apply a force to an outer layer of the hollow-core fiber. A portion of the hollow-core fiber is located in a receiving region of the mount arrangement. The plurality of mounting contacts are positioned around the receiving region. The mounting contacts are distributed around the receiving region, the distribution of the mounting contacts corresponding to a distribution of features of the microstructure of the hollow-core fiber. The mounted hollow core fiber can be used in a radiation source apparatus for providing broadband radiation.Type: ApplicationFiled: June 9, 2022Publication date: October 6, 2022Applicant: ASML NETHERLANDS B. V.Inventors: Sebastian Thomas BAUERSCHMIDT, Patrick Sebastian UEBEL, Peter Maximilian GÕTZ
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Publication number: 20220269183Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.Type: ApplicationFiled: May 11, 2022Publication date: August 25, 2022Applicants: ASML NETHERLANDS B.V., ASML HOLDING N.V.Inventors: Sebastian Thomas Bauerschmidt, Peter Maximilian Götz, Patrick Sebastian Uebel, Ronald Franciscus Herman Hugers, Jan Adrianus Boer, Edwin Johannes Cornelis Bos, Andreas Johannes Antonius Brouns, Vitaliy Prosyentsov, Paul William Scholtes - Van Eijk, Paulus Antonius Andreas Teunissen, Mahesh Upendra Ajgaonkar
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Patent number: 11385402Abstract: A mounted hollow-core fiber arrangement includes a hollow-core fiber having a microstructure, and a mount arrangement including a plurality of mounting contacts configured to apply a force to an outer layer of the hollow-core fiber. A portion of the hollow-core fiber is located in a receiving region of the mount arrangement. The plurality of mounting contacts are positioned around the receiving region. The mounting contacts are distributed around the receiving region, the distribution of the mounting contacts corresponding to a distribution of features of the microstructure of the hollow-core fiber. The mounted hollow core fiber can be used in a radiation source apparatus for providing broadband radiation.Type: GrantFiled: June 17, 2020Date of Patent: July 12, 2022Assignee: ASML Netherlands B.V.Inventors: Sebastian Thomas Bauerschmidt, Patrick Sebastian Uebel, Peter Maximilian Götz
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Patent number: 11360396Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.Type: GrantFiled: August 27, 2020Date of Patent: June 14, 2022Assignees: ASML Netherlands B.V., ASML Holding N.V.Inventors: Sebastian Thomas Bauerschmidt, Peter Maximilian Götz, Patrick Sebastian Uebel, Ronald Franciscus Herman Hugers, Jan Adrianus Boer, Edwin Johannes Cornelis Bos, Andreas Johannes Antonius Brouns, Vitaliy Prosyentsov, Paul William Scholtes-Van Eijk, Paulus Antonius Andreas Teunissen, Mahesh Upendra Ajgaonkar
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Publication number: 20220128912Abstract: An apparatus for receiving input radiation and broadening a frequency range of the input radiation to provide broadband output radiation. The apparatus includes a chamber, a fiber, a gas generating apparatus, and a radical generating apparatus. The fiber includes a hollow core configured to guide radiation propagating through the fiber, the hollow core in fluid communication with the chamber. The gas generating apparatus is configured to provide a gas within the chamber. The radical generating apparatus is configured to provide free radicals within the chamber to reduce contaminants in the gas. The apparatus may be included in a radiation source.Type: ApplicationFiled: January 11, 2022Publication date: April 28, 2022Applicant: ASML Netherlands B.V.Inventors: Patrick Sebastian Uebel, Sebastian Thomas Bauerschmidt, Paul William Scholtes-Van Eijk
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Publication number: 20220128910Abstract: A radiation source includes: a hollow core optical fiber, a working medium; and a pulsed pump radiation source. The hollow core optical fiber has a body and has a hollow core. The working medium is disposed within the hollow core. The pulsed pump radiation source is arranged to produce pulsed pump radiation that is received by, and propagates through, the hollow core from an input end to an output end. One or more parameters of the pulsed pump radiation, the optical fiber and the working medium are configured to allow soliton self-compression of the pulsed pump radiation so as to change a spectrum of the pulsed pump radiation so as to form output radiation. In some embodiments, a length of the optical fiber is such that the output end substantially coincides with a position at which a temporal extent of the pulsed pump radiation is minimal.Type: ApplicationFiled: January 6, 2022Publication date: April 28, 2022Applicant: ASML NETHERLANDS B.V.Inventors: Patrick Sebastian UEBEL, Sebastian Thomas BAUERSCHMIDT, Yongfeng NI
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Patent number: 11287747Abstract: A system and method for providing a radiation source is disclosed. In one arrangement, the radiation source includes a gas cell having a window, an optical fiber that is hollow and has an axial direction, an end thereof being enclosed within the gas cell and optically coupled to the window via an optical path, and a surface, disposed around the end of the optical fiber, and extending past the end of the optical fiber in the axial direction towards the window so as to limit one or more selected from: the exchange of gas between the optical path and the remainder of the gas cell, ingress of plasma towards or into the optical fiber, and/or radical flux towards etch-susceptible surfaces.Type: GrantFiled: August 3, 2020Date of Patent: March 29, 2022Assignee: ASML Netherlands B.V.Inventors: Andrey Nikipelov, Patrick Sebastian Uebel, Amir Abdolvand, Sebastian Thomas Bauerschmidt, Peter Maximilian Götz, Natallia Eduardauna Uzunbajakava
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Patent number: 11262665Abstract: An apparatus (100) for receiving input radiation (108) and broadening a frequency range of the input radiation so as to provide broadband output radiation (110). The apparatus comprises a fiber (102), wherein the fiber (102) may comprise a hollow core (104) for guiding radiation propagating through the fiber (102). The apparatus (100) further comprises an apparatus for providing a gas mixture (106) within the hollow core (104). The gas mixture (106) comprises a hydrogen component, and a working component, wherein the working component is for broadening a frequency range of a received input radiation (108) so as to provide the broadband output radiation (110). The apparatus may be included in a radiation source.Type: GrantFiled: March 24, 2020Date of Patent: March 1, 2022Assignee: ASML Netherlands B.V.Inventors: Patrick Sebastian Uebel, Sebastian Thomas Bauerschmidt, Paul William Scholtes-Van Eijk
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Publication number: 20220045470Abstract: A broadband light source device for creating broadband light pulses includes a hollow-core fiber and a pump laser source device. The hollow-core fiber is configured to create the broadband light pulses by an optical non-linear broadening of pump laser pulses. The hollow-core fiber includes a filling gas, an axial hollow light guiding fiber core configured to support core modes of a guided light field, and an inner fiber structure surrounding the fiber core and configured to support transverse wall modes of the guided light field. The pump laser source device is configured to create and provide the pump laser pulses at an input side of the hollow-core fiber. The transverse wall modes include a fundamental transverse wall mode and second and higher order transverse wall modes.Type: ApplicationFiled: October 21, 2021Publication date: February 10, 2022Applicant: Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.Inventors: Patrick Sebastian Uebel, Philip St. J. Russell, Sebastian Thomas Bauerschmidt
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Publication number: 20220033995Abstract: An alginate-based fiber is made of a composition comprising an alginate, a cellulose and a polyol plasticizer, such as glycerol. The fiber is produced through extrusion in a curing bath containing calcium. The fiber provides excellent strength and flexibility in its unhydrated state for textile applications. The fiber can be used to produce textiles as compostable alternatives to petrochemical based polymers.Type: ApplicationFiled: December 5, 2019Publication date: February 3, 2022Inventors: Theanna Schiros, Asta Skocir, Aaron Nesser, Tessa Callaghan, Aleksandra Gosiewski, Sebastian Thomas Russell, Dong An, Romare Antrobus, Chris Mosher, Helen Lu
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Patent number: 11237486Abstract: A radiation source includes: a hollow core optical fiber, a working medium; and a pulsed pump radiation source. The hollow core optical fiber has a body and has a hollow core. The working medium is disposed within the hollow core. The pulsed pump radiation source is arranged to produce pulsed pump radiation that is received by, and propagates through, the hollow core from an input end to an output end. One or more parameters of the pulsed pump radiation, the optical fiber and the working medium are configured to allow soliton self-compression of the pulsed pump radiation so as to change a spectrum of the pulsed pump radiation so as to form output radiation. In some embodiments, a length of the optical fiber is such that the output end substantially coincides with a position at which a temporal extent of the pulsed pump radiation is minimal.Type: GrantFiled: July 17, 2020Date of Patent: February 1, 2022Assignee: ASML Netherlands B.V.Inventors: Patrick Sebastian Uebel, Sebastian Thomas Bauerschmidt, Yongfeng Ni
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Publication number: 20220011644Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.Type: ApplicationFiled: September 27, 2021Publication date: January 13, 2022Applicant: ASML Netherlands B.V.Inventors: Patrick Sebastian UEBEL, Sebastian Thomas Bauerschmidt, Peter Maximilian Götz
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Patent number: D983314Type: GrantFiled: January 6, 2021Date of Patent: April 11, 2023Assignee: Embedded Steps LLCInventors: Edward Terrana, Sebastian Thomas Terrana