Patents by Inventor Sebastien Turlure

Sebastien Turlure has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND DEVICE FOR ADJUSTING THE DEPOSIT POSITION OF A SEMICONDUCTOR WAFER IN AN OVEN
    Publication number: 20100014749
    Abstract: A method for loading a semiconductor wafer into a process unit comprises opening the process unit, inserting a wafer into the process unit, adjusting the position of the wafer in the process unit so that it is in a certain position in relation to markers, and inserting a camera into the process unit facing the markers. The camera acquires an image of the markers and of a part of the wafer, and displays on a display screen the image acquired. The position of the wafer is adjusted according to the position of the wafer in relation to the markers on the image displayed.
    Type: Application
    Filed: July 16, 2009
    Publication date: January 21, 2010
    Applicant: STMICROELECTRONICS SAS
    Inventor: Sebastien Turlure