Abstract: Systems and methods for a multi-speed programmable batch scrubber are illustrated. The disclosed system includes a brush configured to scrub a disk at a plurality of speeds during cleaning of the disk, a combing system configured to support the disk during cleaning, a cleaning solution dispenser, and a first deionized water dispenser configured to dispense water on the brush during cleaning. The disk is cleaned in a plurality of predetermined cleaning steps, each step including predetermined parameter values such as the brush RPM, the step duration, the dispensing state of the cleaning solution dispenser, and the dispensing state of the deionized water dispenser.

Abstract: An integrated circuit package and method of manufacture is provided. A substrate having a number of contact pads exposed through a passivation layer thereon has a first under bump metallurgy layer over at least one of the contact pads. A top under bump metallurgy layer of copper having a thickness of less than about 800 angstroms is formed over the first under bump metallurgy layer.