Patents by Inventor See Yub Yang

See Yub Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma monitoring apparatus, and plasma processing apparatus including the same
    Patent number: 10748749
    Abstract: A plasma monitoring apparatus includes a reflective structure disposed on a processing chamber providing a space in which plasma for processing a substrate is formed, the reflective structure configured to receive fragments of light incident in a plurality of incident directions from the plasma, and output the fragments of light in a plurality of exit directions by reflecting the fragments of light within the reflective structure; at least one light sensor configured to receive the fragments of light passing through the reflective structure in the plurality of exit directions; and at least one optical spectrometer connected to the at least one light sensor.
    Type: Grant
    Filed: October 30, 2019
    Date of Patent: August 18, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jeong Il Mun, Kyeong Hun Kim, See Yub Yang, Hyung Joo Lee, Jong Woo Sun