Abstract: A mount table having a mount surface on which a workpiece as an object to be measured or worked includes a support unit for supporting the mount table so as to be floated from a surface plate so that the mount table can freely move or rotate on the surface plate finished to be plane or fixing and supporting the mount table on the surface plate and a plurality of artifact for measuring a plurality of attitudes on the mount table to detect the positions and rotations of the mount table in respective attitudes.

Abstract: A measuring machine includes a probe mounting portion, a probe mounted on the probe mounting portion, for contacting a measuring surface of a workpiece, and a detector for detecting an amount of displacement of the probe as the probe moves in contact with the measuring surface of the workpiece. A cleaning device is provided at the probe mounting portion, with a nozzle for ejecting gas upon the measuring surface of the workpiece when the probe is positioned close to the measuring surface. A rotative driving device is provided for rotatively driving the cleaning device about the probe.