Patents by Inventor Seiichiro Udagawa

Seiichiro Udagawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7594801
    Abstract: The amount of chemical liquids dispensed by a chemical liquid supply apparatus is stabilized and dispensing accuracy is remarkably improved. A pump discharges a liquid accommodated in a liquid tank. A filter is connected to the pump through a pump outlet flow path to which a pump discharge-side valve for opening/closing the flow path is provided. A dispensing nozzle (liquid dispense portion) is connected to the filter through a liquid discharge flow path to which a discharge valve for opening/closing the flow path is provided. A vacuum source communicates with the filter through an exhaust flow path to which a deaeration valve for opening/closing the flow path is provided.
    Type: Grant
    Filed: December 6, 2002
    Date of Patent: September 29, 2009
    Assignee: Koganei Corporation
    Inventor: Seiichiro Udagawa
  • Publication number: 20050175472
    Abstract: The amount of chemical liquids dispensed by a chemical liquid supply apparatus is stabilized and dispensing accuracy is remarkably improved. A pump discharges a liquid accommodated in a liquid tank. A filter is connected to the pump through a pump outlet flow path to which a pump discharge-side valve for opening/closing the flow path is provided. A dispensing nozzle (liquid dispense portion) is connected to the filter through a liquid discharge flow path to which a discharge valve for opening/closing the flow path is provided. A vacuum source communicates with the filter through an exhaust flow path to which a deaeration valve for opening/closing the flow path is provided.
    Type: Application
    Filed: December 6, 2002
    Publication date: August 11, 2005
    Applicant: Koganei Corporation
    Inventor: Seiichiro Udagawa