Patents by Inventor Seiichiro YUASA

Seiichiro YUASA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus, editing apparatus and method and non-transitory storage medium
    Patent number: 10254816
    Abstract: A control unit of a substrate processing apparatus has a storage medium that stores operation commands as a single macro. The operation commands include an operation command for shutdown of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred from a normally-operating condition to a condition suitable for man power maintenance, and an operation command for startup of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred to a condition suitable for normal operation after completion of the man power maintenance. The control unit makes a display unit display both the operation commands for shutdown and startup together on a single ejection screen of the display unit, and allows editing of the macro on the single edit screen by using the input unit.
    Type: Grant
    Filed: January 30, 2015
    Date of Patent: April 9, 2019
    Assignee: Tokyo Electron Limited
    Inventors: Seiichiro Yuasa, Kunihiko Fujimoto
  • SUBSTRATE PROCESSING APPARATUS, EDITING APPARATUS AND METHOD AND NON-TRANSITORY STORAGE MEDIUM
    Publication number: 20150220136
    Abstract: A control unit of a substrate processing apparatus has a storage medium that stores operation commands as a single macro. The operation commands include an operation command for shutdown of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred from a normally-operating condition to a condition suitable for man power maintenance, and an operation command for startup of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred to a condition suitable for normal operation after completion of the man power maintenance. The control unit makes a display unit display both the operation commands for shutdown and startup together on a single ejection screen of the display unit, and allows editing of the macro on the single edit screen by using the input unit.
    Type: Application
    Filed: January 30, 2015
    Publication date: August 6, 2015
    Inventors: Seiichiro YUASA, Kunihiko FUJIMOTO