Abstract: An apparatus and a method for separating a specified gas from a gas to be treated containing the specified gas comprising at least one ingredient, which comprises allowing the gas to be treated to flow through a column without the use of another gas for transferring the gas to be treated, while keeping the inside of the column packed with a packing material at a reduced pressure. The above apparatus and method can be suitably used for separating a specified gas having a high purity at a low cost.

Abstract: An exhaust gas filter comprises an outer tube, a plurality of center-closing filter units each having an isolation plate; and a plurality of center-opening filter units having an annular isolation plate, two kinds of filter units being arranged alternately in the outer tube. The isolation plate and annular isolation plate are enclosed by flammable fibers. When a contaminated gas goes through the flammable fibers, it can be filtrated.

Abstract: A unit for separating an exhaust gas containing PFC gases including CF4 and C2F6 generated in a production process, wherein the exhaust gas is concentrated in a concentration device, and then separated chromatographically in a chromatographic separation device using nitrogen as a carrier gas. The chromatographic separation device is packed with molecular sieve 13X or F-9 or the like. The unit is capable of effectively separating CF4 and C2F6.

Abstract: An apparatus and a method for separating a specified gas from a gas to be treated containing the specified gas comprising at least one ingredient, which comprises allowing the gas to be treated to flow through a column without the use of another gas for transferring the gas to be treated, while keeping the inside of the column packed with a packing material at a reduced pressure. The above apparatus and method can be suitably used for separating a specified gas having a high purity at a low cost.

Abstract: An exhaust gas filter comprises an outer tube, a plurality of center-closing filter units each having an isolation plate; and a plurality of center-opening filter units having an annular isolation plate, two kinds of filter units being arranged alternately in the outer tube. The isolation plate and annular isolation plate are enclosed by flammable fibers. When a contaminated gas goes through the flammable fibers, it can be filtrated.

Abstract: A unit for separating an exhaust gas containing PFC gases including CF4 and C2F6 generated in a production process, wherein the exhaust gas is concentrated in a concentration device, and then separated chromatographically in a chromatographic separation device using nitrogen as a carrier gas. The chromatographic separation device is packed with molecular sieve 13X or F-9 or the like. The unit is capable of effectively separating CF4 and C2F6.

Abstract: A discharge gas containing PFC gas including CF4 and NF3 generated from a manufacturing process (10) is adsorbed at an adsorbing device (18) and then desorbed using nitrogen as a purge gas. A desorbed gas with CF4 and NF3 concentrated can be obtained in this manner. The desorbed gas is then supplied to a chromatographic separator (20) for chromatographic separation with nitrogen as a carrier gas. In this manner, CF4 and NF3 within the PFC gas can be separated. In particular, because the gas is once concentrated at the adsorbing device (18), chromatographic separation of the gas constituents can be efficiently performed. By independently concentrating CF4 and NF3 obtained by the chromatographic separation, high purity gas constituents of the PFC gas can be obtained, and reused at the manufacturing process (10).

Abstract: A discharge gas containing PFC gas including CF4 and NF3 generated from a manufacturing process (10) is concentrated at a concentrator (18) and then chromatographically separated at a chromatographic separator (20) with nitrogen as a carrier gas. In this manner, CF4 and NF3 within the PFC gas can be separated. In particular, because the gas is once concentrated at the concentrator (18), chromatographic separation can be efficiently achieved. By independently concentrating CF4 and NF3 obtained by the chromatographic separation, high purity gas constituents of the PFC gas can be obtained, and reused at the manufacturing process (10).

Abstract: A discharge gas containing PFC gas including CF4 and NF3 generated from a manufacturing process (10) is adsorbed at an adsorbing device (18) and then desorbed using nitrogen as a purge gas. A desorbed gas with CF4 and NF3 concentrated can be obtained in this manner. The desorbed gas is then supplied to a chromatographic separator (20) for chromatographic separation with nitrogen as a carrier gas. In this manner, CF4 and NF3 within the PFC gas can be separated. In particular, because the gas is once concentrated at the adsorbing device (18), chromatographic separation of the gas constituents can be efficiently performed. By independently concentrating CF4 and NF3 obtained by the chromatographic separation, high purity gas constituents of the PFC gas can be obtained, and reused at the manufacturing process (10).

Abstract: A discharge gas containing PFC gas including CF4 and NF3 generated from a manufacturing process (10) is concentrated at a concentrator (18) and then chromatographically separated at a chromatographic separator (20) with nitrogen as a carrier gas. In this manner, CF4 and NF3 within the PFC gas can be separated. In particular, because the gas is once concentrated at the concentrator (18), chromatographic separation can be efficiently achieved. By independently concentrating CF4 and NF3 obtained by the chromatographic separation, high purity gas constituents of the PFC gas can be obtained, and reused at the manufacturing process (10).

Abstract: A double-wrap dry scroll vacuum pump for use as a vacuum pump for nuclear power equipment. The pump has a pump body including a suction port capable of being communicated with a vessel to be evacuated and a discharge port for discharging wrap compressed gas to an outside of the pump body after an operation of gas compression by the progressive volume reduction of a sealed space, formed by a revolving scroll and a pair of stationary scrolls. The pump further includes a pair of enclosing members which cover opposite end portions of a drive shaft and are mounted in a gas-tight state around the revolving scroll. The pump has compressed gas feed ports for feeding compressed gas therethrough to the enclosing members, the compressed gas having a higher pressure than the wrap compressed gas and is discharged together with the wrap compressed gas through the discharge port.

Abstract: The improved isotope separator comprises a vacuum vessel, a plasma generator located substantially in the center of the vacuum vessel, an electrode bounded by a hyperboloid of one sheet and a pair of electrodes bounded by a hyperboloid of two sheets, said electrodes being located within the vacuum vessel in such a way as to surround the plasma generator, a power source for supplying said electrodes with a fixed voltage and a pulsating voltage, and magnetic field generating means located outside the vacuum vessel. The apparatus is implemented by a method for isotope separation that achieves high separation factor per stage (process), that enables the process throughput to be increased with ease and which yet is applicable to the isotopic separation of many elements.

Abstract: The improved isotope separator comprises a vacuum vessel, a plasma generator located substantially in the center of the vacuum vessel, an electrode bounded by a hyperboloid of one sheet and a pair of electrodes bounded by a hyperboloid of two sheets, said electrodes being located within the vacuum vessel in such a way as to surround the plasma generator, a power source for supplying said electrodes with a fixed voltage and a pulsating voltage, and magnetic field generating means located outside the vacuum vessel. The apparatus is implemented by a method for isotope separation that achieves high separation factor per stage (process), that enables the process throughput to be increased with ease and which yet is applicable to the isotopic separation of many elements.

Abstract: A thread groove type vacuum pump in which the gap between a rotor and a stator is not subjected to any influence of the rotor temperature and thus the pumping performance does not deteriorate during plasma combustion in a nuclear fusion reactor. The thread groove pumping portion is formed as a circular cone so that the expansion and contraction of the rotor occurs along the generatrix of the circular cone. The pump exhibits supreme pumping performance throughout the whole running mode of the vacuum pumping system of the nuclear fusion reactor because the gap between the rotor and the stator is kept constant despite changes of thermal expansion due to the temperature change of the rotor caused by the different gas loads.

Abstract: The present invention relates to improvement of a quadrupole electrode for use in a mass spectrometer or the like, in which two pairs of electrode rods 1, 2, 3 and 4 formed in such a manner that the section of the opposed face of each rod is hyperbolic or circular, and each electrode rod is made of a ceramic and the surface of the electrode is coated with a coating layer 5 of a conductive metal. Further, the present invention relates to a production process, characterized by incorporating such four electrodes at predetermined intervals. Since the electrodes are mainly made of a ceramic which is easily formable with a high dimensional accuracy, the adjustment of the positional relationship between the electrodes during assembling can be made without much effort, which enables a quadrupole electrode having a high performance to be provided with a good reproducibility at a low cost.

Abstract: An armature stator comprises an iron core and a coil directly mounted on the iron core. The coil is composed of wound electric wire which has a coating comprising an inorganic material, such as ceramic. A bonding material of the inorganic material is formed over the coil and iron core for filling any gaps and adhering the coil and iron core together into a unitary structure. To improve the reliability of the coil, after the electric wire is wound to form the coil, a filling material comprised of the inorganic material is formed over the coil by vacuum impregnation, and then sintered so as to repair defects in the coating disposed on the electric wire. After the bonding material is formed over the coil, which is directly mounted on the iron core, it is cured under high temperature. The armature stator thus constructed can be used with high reliability in high temperature and high vacuum applications.

Abstract: In a quadrupole mass spectrometer which includes four parallel rod electrodes between opposite pairs of which overlapping voltages.+-.(U+V cos .omega. t) are applied (where U: a continuous voltage and V cos .omega. t: a radio-frequency voltage) and which effects mass-analysis by an electric field formed within the four parallel rod electrodes, at least one parameter of U, V and .omega. has two different values, and the values are changed over to select the first stable region or the second stable region, the first stable region being nearest to the original point and the second stable region being next near to the original point on the a - q plane (where a:ordinate, q:abscissa) showing "stability diagram", and the ions being able to pass through the four parallel electrodes under the conditions of the first and second stable regions, where the variable a=8eU/mr.sub.O.sup.2 .omega..sup.2, q=4eV/mr.sub.O.sup.2 .omega..sup.