Abstract: An apparatus for inspecting a pattern to detect a small pattern defect has an illuminating light source, as illuminating optical system having a plurality of illuminating portions for switching an optical path of illuminating light flux to a surface of board constituting the inspected object from a plurality of directions different from each other, a detecting optical system having a variable magnification using an object lens for condensing reflected diffracted light from the illuminated board, a focusing optical system having a variable magnification capable of focusing an optical image by converged reflected diffracted light with a desired focusing magnification and an optical detector for detecting the optical image focused by the focusing optical system to convert it into an image signal, an A/D converter for converting the image signal into a digital image signal, and an image signal processor for processing the digital image signal to detect the defect.

Abstract: An air and liquid-tight container is capable of storing different substances in different compartments sealingly separated by a front gasket having two separate parts that are independently slidable. A rear gasket is connectable to a push rod so as to function as a plunger, the front gasket being slidable in response to sliding of the rear gasket, thereby enabling the substance in the rear compartment to be introduced into the front compartment through a bypass. The front and rear gaskets are encased in the tubular body at a compressibility C (%) of 2% to 10%, with the product of the compressibility and the contact area (mm.sup.2) of the gaskets with the inside wall of the tubular wall falling within the range of 150 to 400.