Patents by Inventor Seiji Taniike

Seiji Taniike has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Silica glass member for semiconductor and production method thereof
    Patent number: 7082789
    Abstract: A silica glass member for semiconductor in which each concentration of Fe, Cu, Cr and Ni is 5 ppb or less and the concentration of an OH group is 30 ppm or less and which has a viscosity of 1013.0 poise or more at 1200° C. is provided as a silica glass member for semiconductor having high heat-resistance and higher purity.
    Type: Grant
    Filed: November 21, 2002
    Date of Patent: August 1, 2006
    Assignee: Toshiba Ceramics Co., Ltd.
    Inventors: Masanobu Ezaki, Lian-Sheng Pan, Seiji Taniike
  • Silica glass member for semiconductor and production method thereof
    Publication number: 20030101748
    Abstract: A silica glass member for semiconductor in which each concentration of Fe, Cu, Cr and Ni is 5 ppb or less and the concentration of an OH group is 30 ppm or less and which has a viscosity of 1013.0 poise or more at 1200° C. is provided as a silica glass member for semiconductor having high heat-resistance and higher purity.
    Type: Application
    Filed: November 21, 2002
    Publication date: June 5, 2003
    Applicant: TOSHIBA CERAMICS CO., LTD.
    Inventors: Masanobu Ezaki, Lian-Sheng Pan, Seiji Taniike