Abstract: An optical filter according to the invention includes: first and second substrates opposed to each other; first and second reflecting films provided to the first and second substrates; first and second bonding films provided to the first and second substrates; and first and second barrier films disposed on surfaces of the first and second reflecting films, wherein the first barrier film has a transmittance of ozone lower than a transmittance of ozone the first reflecting film has, and the second barrier film has a transmittance of ozone lower than a transmittance of ozone the second reflecting film has. Accordingly, the reflecting films are protected from ozone or ultraviolet radiation during the manufacturing process of the optical filter and thereby the optical filter characteristics is prevented from being deteriorated.

Abstract: In a tunable interference filter according to the invention, a second substrate includes a light transmission hole and alight transmissive member provided within the light transmission hole, and the light transmission hole is formed in a tapered shape having a diameter dimension of an inner circumferential surface increasing from the first surface toward the second surface, and the light transmissive member has a light incident surface in parallel to the first reflection surface and the second reflection surface, a light exiting surface in parallel to the first reflection surface and the second reflection surface, and a tapered side surface having a diameter dimension increasing from the first surface toward the second surface, and the tapered side surface is in contact with the inner circumferential surface of the light transmission hole.

Abstract: A functional element including a substrate having a principal surface, a groove portion (a first groove portion, a second groove portion) disposed on the principal surface, and a fixed electrode section (a first fixed electrode finger, a second fixed electrode finger) laid across the groove portion on the substrate, wherein, in the groove portion, a raised portion formed by using at least one of the substrate and the fixed electrode section is provided in a position overlapping with the fixed electrode section in a plan view, the raised portion has a bonded surface (an end face), a wiring line (a first wiring line, a second wiring line) is disposed on the bonded surface, and the substrate and the fixed electrode section are connected with the wiring line sandwiched between the substrate and the fixed electrode section.

Abstract: A functional device according to an embodiment of the invention includes: an insulating substrate; a movable section; movable electrode fingers provided in the movable section; and fixed electrode fingers provided on the insulating substrate and arranged to be opposed to the movable electrode fingers. The fixed electrode fingers include: first fixed electrode fingers arranged on one side of the movable electrode fingers; and second fixed electrode fingers arranged on the other side of the movable electrode fingers. The first fixed electrode fingers and the second fixed electrode fingers are arranged to be spaced apart from each other.

Abstract: A light filter comprising a first substrate, a second substrate, a first optical film, a second optical film, a second bonding film, and a first bonding film, wherein the first optical film is formed to be a multilayer film in which a first optical substrate film, a first optical intermediate film, and a first optical surface film are stacked, the second optical film is formed to be a multilayer film in which a second optical substrate film, a second optical intermediate film, and a second optical surface film are stacked, a part of the first bonding film is one of the first optical substrate film and the first optical intermediate film, and a part of the second bonding film is one of the second optical substrate film and the second optical intermediate film.

Abstract: An etalon includes a fixed mirror disposed on a first substrate, a movable mirror disposed on a second substrate to face the fixed mirror with a gap interposed therebetween, a first electrode disposed on the surface of the first substrate facing the second substrate, a second electrode disposed on a first surface of the second substrate facing the first substrate and separated from the first electrode, and a warp preventing film disposed on a second surface of the second substrate so as to cover at least the movable mirror in a plan view. The direction of an internal stress acting in the in-plane direction of the warp preventing film is parallel to the direction of an internal stress acting in the in-plane direction of the movable mirror and the second electrode.

Abstract: An optical filter includes a first substrate which has a support portion, a second substrate which is supported by the support portion, a first optical film which is provided on the first substrate, and a second optical film which is provided on the second substrate to face the first optical film. The first substrate and the second substrate are fixed to each other by bonding a first bonding film which is provided on the entire region of a support surface of the support portion supporting the second substrate and a second bonding film which is provided on at least a region (opposing surface) facing the entire region of the support surface from a supported surface of the second substrate.

Abstract: An etalon includes a first substrate and a second substrate. The first substrate has a first protrusion that does not face the second substrate, and a first electrode pad is formed on the first protrusion, whereby connection reliability can be improved.

Abstract: An optical filter includes: a lower substrate; a lower mirror provided to the lower substrate; a lower electrode provided to the lower substrate; an upper substrate disposed so as to be opposed to the lower electrode; an upper mirror provided to the upper substrate, and opposed to the lower mirror; and an upper electrode provided to the upper substrate, and opposed to the lower electrode, wherein the upper substrate has a groove surrounding the upper mirror in a plan view, the groove includes a first side surface section, a second side surface section, a bottom surface section, a first end section located between the first side surface section and the bottom surface section, and a second end section located between the second side surface section and the bottom surface section, in a cross-sectional view, and the first end section and the second end section each have a curved surface.

Abstract: An optical filter according to the invention includes: first and second substrates opposed to each other; first and second reflecting films provided to the first and second substrates; first and second bonding films provided to the first and second substrates; and first and second barrier films disposed on surfaces of the first and second reflecting films, wherein the first barrier film has a transmittance of ozone lower than a transmittance of ozone the first reflecting film has, and the second barrier film has a transmittance of ozone lower than a transmittance of ozone the second reflecting film has. Accordingly, the reflecting films are protected from ozone or ultraviolet radiation during the manufacturing process of the optical filter and thereby the optical filter characteristics is prevented from being deteriorated.

Abstract: A method of manufacturing an optical filter according to the invention includes the steps of forming a first bonding film in a first bonding area of a first substrate provided with a first reflecting film, forming a second bonding film in a second bonding area of a second substrate provided with a second reflecting film, irradiating the first bonding area with ozone or an ultraviolet ray using a first mask member, irradiating the second bonding area with ozone or an ultraviolet ray using a second mask member, and bonding the first bonding film and the second bonding film to each other to bond the first substrate and the second substrate to each other, thereby protecting the reflecting films from ozone or ultraviolet radiation to prevent the reflecting films from being deteriorated in the manufacturing process.

Abstract: A variable wavelength interference filter includes: a first substrate having a light transmissive property; a second substrate opposed to and bonded to one surface of the first substrate; a first reflecting film disposed on the one surface of the first substrate; a second reflecting film disposed on a first surface of the second substrate opposed to the first substrate, and opposed to the first reflecting film via a gap; and a variable section adapted to vary the gap, wherein the second substrate includes a light transmission opening disposed at a position opposed to the first reflecting film, and penetrating through the second substrate from the first surface to the second surface on the opposite side, and a planar transmissive member opposed to the first substrate and adapted to close the light transmission opening.

Abstract: In a tunable interference filter according to the invention, a second substrate includes a light transmission hole and alight transmissive member provided within the light transmission hole, and the light transmission hole is formed in a tapered shape having a diameter dimension of an inner circumferential surface increasing from the first surface toward the second surface, and the light transmissive member has a light incident surface in parallel to the first reflection surface and the second reflection surface, a light exiting surface in parallel to the first reflection surface and the second reflection surface, and a tapered side surface having a diameter dimension increasing from the first surface toward the second surface, and the tapered side surface is in contact with the inner circumferential surface of the light transmission hole.

Abstract: A wavelength variable interference filter includes: a first substrate which has a light transmissive property; a second substrate which has a light transmissive property and is disposed to face one surface of the first substrate and is bonded thereto; a first reflection film which is provided on the first substrate; a second reflection film which is provided on the second substrate; and a variable section which varies the gap; wherein the second substrate includes: a first layer which has a movable section; and a second layer which is laminated to a surface of the first layer facing the first substrate, is formed in a plate shape with a uniform thickness, and has a support section configured to displaceably support the movable section; and the first layer is not laminated to at least a region overlapping with the support section in the planar view.

Abstract: A nozzle substrate having a nozzle hole for discharging droplets includes a first substrate layer and a second substrate layer. The first substrate layer is disposed on a fluid discharge side of the nozzle substrate. The first substrate layer is made of silicon material. The second substrate layer is disposed on a fluid introduction side of the nozzle substrate.

Abstract: An electrostatic actuator includes a vibration plate, and a counter electrode facing the vibration plate and spaced apart therefrom by a gap. The vibration plate is in a multistage shape in such a manner that the thickness is increased gradually from a central portion toward the outer periphery of the vibration plate.

Abstract: A method for manufacturing a silicon substrate comprises: forming a silicon nitride film on a patterning area on a surface of a silicon base material; forming a silicon oxide film on an area excluding the patterning area on the surface of the silicon base material after forming the silicon nitride film; removing the silicon nitride film to expose the silicon base material of the patterning area; and etching the silicon base material of the patterning area.

Abstract: The invention relates to a two-package coating agent for forming an antifogging film. This coating agent contains a first coating agent comprising an isocyanate containing an isocyanate group; and a second coating agent comprising (a) a polyol component comprising at least a water-absorbing polyol and a hydrophobic polyol and (b) a surfactant comprising a group that is reactive with the isocyanate group. It is possible to form an antifogging film by a method including the steps of mixing the first and second coating agents together to prepare a coating agent; applying the coating agent to the substrate to form a precursory film on the substrate; and hardening the precursory film under room temperature or heating into the antifogging film.

Abstract: An antifogging article includes a substrate and an antifogging film covering the substrate. This antifogging film contains a water-absorbing organic polymer and an inorganic substance and has a water repellent finishing on a surface of the antifogging film. Another antifogging article includes (1) a substrate, (2) a water-absorbing, antifogging film covering the substrate, and (3) a water-permeable, protective film covering the antifogging film. This antifogging film contains (a) a polyvinyl acetal resin having a degree of acetalization of not greater than 10 mol % and (b) a hydrolysate or partial hydrolysate of an alkylsilylisocyanate represented by the general formula R2nSiR14−n where R1 is an alkyl group having a carbon atom number of 1 or 2, R2 is an isocyanate group, and n is 1 or 2. These antifogging articles are superior in antifogging property and abrasion resistance.

Abstract: The invention relates to an article having a substrate and photocatalytic film covering the substrate. This film contains (1) a film-forming component including ZrO2 and SiO2 and (2) TiO2 crystals dispersed in the film-forming component. These ZrO2, SiO2 and TiO2 crystals respectively are in amounts of 25-60 wt %, 15-50 wt % and 25-45 wt %, based on the weight of the film. The article is improved in photocatalytic activity, abrasion resistance and chemical resistance by the provision of the film.