Patents by Inventor Seiki Tsurudo

Seiki Tsurudo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5903006
    Abstract: A liquid concentration detecting apparatus which permits a real-time and high-accuracy detection of concentration of a liquid (particularly an etching or cleaning solution) used in a semiconductor plant, with a simple configuration at a low cost. The liquid concentration detecting apparatus 1 has a cell 2 to which a liquid is supplied, and a projecting section 4 and a receiving section 5 arranged opposite to each other in a direction at right angles to the axial line of the cell. A light of a prescribed wavelength is projected from this projecting section 4 through the liquid in the cell 2 to the receiving section 5, and the concentration of the liquid is determined by detecting the amount of light received by the receiving section.
    Type: Grant
    Filed: May 27, 1997
    Date of Patent: May 11, 1999
    Assignee: Norihiro Kiuchi
    Inventors: Norihiro Kiuchi, Kunimitsu Tamura, Seiki Tsurudo