Patents by Inventor Seiya NAGAI

Seiya NAGAI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • In-line type film forming apparatus and method of manufacturing magnetic recording medium using the same
    Patent number: 10381034
    Abstract: Provided is an in-line type film forming apparatus including a processing chamber which is disposed to deviate from a closed path and is connected to a corner chamber, a first loading and unloading unit which unloads a substrate from a carrier and moves the substrate to the inside of the processing chamber, a second loading and unloading unit which unloads the substrate processed in the processing chamber and loads the substrate on the carrier, and a control device which performs control of driving the first and second loading and unloading units to unload the substrate from the carrier and to move the substrate to the inside of the processing chamber, and to take out the substrate processed in the processing chamber in advance from the processing chamber and to load the substrate on the carrier.
    Type: Grant
    Filed: November 5, 2014
    Date of Patent: August 13, 2019
    Assignee: SHOWA DENKO K.K.
    Inventors: Seiya Nagai, Satoru Ueno
  • IN-LINE TYPE FILM FORMING APPARATUS AND METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM USING THE SAME
    Publication number: 20150125597
    Abstract: Provided is an in-line type film forming apparatus including a processing chamber which is disposed to deviate from a closed path and is connected to a corner chamber, a first loading and unloading unit which unloads a substrate from a carrier and moves the substrate to the inside of the processing chamber, a second loading and unloading unit which unloads the substrate processed in the processing chamber and loads the substrate on the carrier, and a control device which performs control of driving the first and second loading and unloading units to unload the substrate from the carrier and to move the substrate to the inside of the processing chamber, and to take out the substrate processed in the processing chamber in advance from the processing chamber and to load the substrate on the carrier.
    Type: Application
    Filed: November 5, 2014
    Publication date: May 7, 2015
    Applicant: SHOWA DENKO K.K.
    Inventors: Seiya NAGAI, Satoru UENO