Patents by Inventor Sekar Krishnasamy
Sekar Krishnasamy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230347310Abstract: A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a vacuum port in an upper portion of the chamber, a chemical delivery system configured to inject a reactant or precursor gas into a lower portion of the chamber, a paddle assembly, and a motor to rotate a drive shaft of the paddle assembly. The lower portion of the chamber forms a half-cylinder. The paddle assembly includes a rotatable drive shaft extending through the chamber along the axial axis of the half cylinder, and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by the motor orbits the plurality of paddles about the drive shaft.Type: ApplicationFiled: June 21, 2023Publication date: November 2, 2023Inventors: Jonathan Frankel, Colin C. Neikirk, Pravin K. Narwankar, Quoc Truong, Govindraj Desai, Sekar Krishnasamy
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Publication number: 20230313368Abstract: A method of coating particles includes dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the chamber that forms a half-cylinder, evacuating the chamber through a vacuum port in an upper portion of the chamber, rotating a paddle assembly such that a plurality of paddles orbit a drive shaft to stir the particles in the particle bed, injecting a reactant or precursor gas through a plurality of channels into the lower portion of the chamber as the paddle assembly rotates to coat the particles, and injecting the reactant or precursor gas or a purge gas through the plurality of channels at a sufficiently high velocity such that the reactant or precursor a purge gas de-agglomerates particles in the particle bed.Type: ApplicationFiled: June 2, 2023Publication date: October 5, 2023Inventors: Jonathan Frankel, Quoc Truong, Sekar Krishnasamy, Govindraj Desai, Sandip S. Desai
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Publication number: 20230279543Abstract: A reactor for coating particles includes a stationary vacuum chamber that has a lower portion that forms a half-cylinder and an upper portion and that holds a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, and a gas injection assembly that includes a vaporizer to convert a first liquid to a first reactant or precursor gas, a manifold to receive the first reactant or precursor gas from the vaporizer, and a plurality of channels leading from the manifold to a plurality of apertures located in the lower portion of the chamber.Type: ApplicationFiled: May 9, 2023Publication date: September 7, 2023Inventors: Jonathan Frankel, Colin C. Neikirk, Pravin K. Narwankar, Quoc Truong, Govindraj Desai, Sekar Krishnasamy, Shrikant Swaminathan
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Patent number: 11717800Abstract: A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a vacuum port in an upper portion of the chamber, a chemical delivery system configured to inject a reactant or precursor gas into a lower portion of the chamber, a paddle assembly, and a motor to rotate a drive shaft of the paddle assembly. The lower portion of the chamber forms a half-cylinder. The paddle assembly includes a rotatable drive shaft extending through the chamber along the axial axis of the half cylinder, and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by the motor orbits the plurality of paddles about the drive shaft.Type: GrantFiled: April 22, 2020Date of Patent: August 8, 2023Assignee: Applied Materials, Inc.Inventors: Jonathan Frankel, Colin C. Neikirk, Pravin K. Narwankar, Quoc Truong, Govindraj Desai, Sekar Krishnasamy
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Patent number: 11692265Abstract: A method of coating particles includes dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the chamber that forms a half-cylinder, evacuating the chamber through a vacuum port in an upper portion of the chamber, rotating a paddle assembly such that a plurality of paddles orbit a drive shaft to stir the particles in the particle bed, injecting a reactant or precursor gas through a plurality of channels into the lower portion of the chamber as the paddle assembly rotates to coat the particles, and injecting the reactant or precursor gas or a purge gas through the plurality of channels at a sufficiently high velocity such that the reactant or precursor a purge gas de-agglomerates particles in the particle bed.Type: GrantFiled: March 17, 2022Date of Patent: July 4, 2023Assignee: Applied Materials, Inc.Inventors: Jonathan Frankel, Quoc Truong, Sekar Krishnasamy, Govindraj Desai, Sandip S. Desai
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Patent number: 11674223Abstract: A reactor for coating particles includes a stationary vacuum chamber having a lower portion that forms a half-cylinder and an upper portion to hold a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, a motor to rotate a drive shaft of the paddle assembly, a chemical delivery system to deliver a first fluid, and a first gas injection assembly to receive the first fluid from the chemical delivery system and having apertures configured to inject a first reactant or precursor gas into the lower portion of the chamber and such that the first reactant or precursor gas flows substantially tangent to a curved inner surface of the half-cylinder.Type: GrantFiled: April 22, 2020Date of Patent: June 13, 2023Assignee: Applied Materials, Inc.Inventors: Jonathan Frankel, Colin C. Neikirk, Pravin K. Narwankar, Quoc Truong, Govindraj Desai, Sekar Krishnasamy, Shrikant Swaminathan
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Publication number: 20230127489Abstract: A reactor for coating particles includes a rotatable reactor assembly including a drum configured to hold a plurality of particles to be coated, an inlet tube, and an outlet tube, a stationary gas inlet line coupled to the inlet tube by a rotary inlet seal, a stationary gas outlet line coupled to the outlet tube by a rotary outlet seal, and a motor to rotate the rotatable reactor assembly.Type: ApplicationFiled: October 21, 2022Publication date: April 27, 2023Applicant: Applied Materials, Inc.Inventors: Brian Hayes Burrows, Sekar Krishnasamy, Ayyanagouda Raravi, Monika Mudalkar, Govindraj Desai, Hemantha Kumar Raju, Basavaraj Pattanshetty, David Masayuki Ishikawa, Visweswaren Sivaramakrishnan, Shrikant Swaminathan, Mario Cambron, Robert Navasca, Miaojun Wang, Jonathan Frankel
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Publication number: 20230132290Abstract: A deposition system includes an isolator or fume hood and a reactor for coating particles, the reactor including a rotatable reactor assembly positioned within the isolator or fume hood and including a reactor drum configured to hold a plurality of particles to be coated, an inlet tube, and an outlet tube. The reactor drum is configured to be detached from the inlet tube and the outlet tube by an operator while the reactor drum remains within the isolator or fume hood.Type: ApplicationFiled: October 21, 2022Publication date: April 27, 2023Inventors: Brian Hayes Burrows, Sekar Krishnasamy, Ayyanagouda Raravi, Monika Mudalkar, Govindraj Desai, Hemantha Kumar Raju, Basavaraj Pattanshetty, David Masayuki Ishikawa, Visweswaren Sivaramakrishnan, Shrikant Swaminathan, Mario Cambron, Robert Navasca, Miaojun Wang, Jonathan Frankel
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Publication number: 20230128094Abstract: A reactor for coating particles includes a rotatable reactor assembly includes a reactor drum configured to hold a plurality of particles to be coated, an inlet tube, and an outlet tube. The drum includes a cylindrical tube, and an inlet-side endplate secured to cover an inlet-side opening of the cylindrical tube and/or an outlet-side endplate secured to cover an outlet-side opening of the cylindrical tube. A stationary gas inlet line is coupled to the inlet tube by a rotary inlet seal, a stationary gas outlet line is coupled to the outlet tube by a rotary outlet seal, and a motor rotates the rotatable reactor assembly. The inlet tube is releasably mechanically secured to the inlet-side endplate and the outlet tube is releasably mechanically secured to the outlet-side endplate.Type: ApplicationFiled: October 21, 2022Publication date: April 27, 2023Inventors: Brian Hayes Burrows, Sekar Krishnasamy, Ayyanagouda Raravi, Monika Mudalkar, Govindraj Desai, Hemantha Kumar Raju, Basavaraj Pattanshetty, David Masayuki Ishikawa, Visweswaren Sivaramakrishnan, Shrikant Swaminathan, Mario Cambron, Robert Navasca, Miaojun Wang, Jonathan Frankel
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Publication number: 20220205091Abstract: A method of coating particles includes dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the chamber that forms a half-cylinder, evacuating the chamber through a vacuum port in an upper portion of the chamber, rotating a paddle assembly such that a plurality of paddles orbit a drive shaft to stir the particles in the particle bed, injecting a reactant or precursor gas through a plurality of channels into the lower portion of the chamber as the paddle assembly rotates to coat the particles, and injecting the reactant or precursor gas or a purge gas through the plurality of channels at a sufficiently high velocity such that the reactant or precursor a purge gas de-agglomerates particles in the particle bed.Type: ApplicationFiled: March 17, 2022Publication date: June 30, 2022Inventors: Jonathan Frankel, Quoc Truong, Sekar Krishnasamy, Govindraj Desai, Sandip S. Desai
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Patent number: 11299806Abstract: A method of coating particles includes dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the chamber that forms a half-cylinder, evacuating the chamber through a vacuum port in an upper portion of the chamber, rotating a paddle assembly such that a plurality of paddles orbit a drive shaft to stir the particles in the particle bed, injecting a reactant or precursor gas through a plurality of channels into the lower portion of the chamber as the paddle assembly rotates to coat the particles, and injecting the reactant or precursor gas or a purge gas through the plurality of channels at a sufficiently high velocity such that the reactant or precursor a purge gas de-agglomerates particles in the particle bed.Type: GrantFiled: April 22, 2020Date of Patent: April 12, 2022Assignee: Applied Materials, Inc.Inventors: Jonathan Frankel, Quoc Truong, Sekar Krishnasamy, Govindraj Desai, Sandip S. Desai
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Publication number: 20220032258Abstract: A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a chemical delivery system, and a paddle assembly. The paddle assembly includes a rotatable drive shaft and a first plurality of paddles and a second plurality of paddles that extend radially from the drive shaft. The spacing, cross-sections, and oblique angles of the paddles are such that orbiting of the paddles causes the first plurality of paddles and the second plurality of paddles to displace substantially equal volumes in opposite directions in the lower portion of the stationary vacuum chamber.Type: ApplicationFiled: October 16, 2020Publication date: February 3, 2022Inventors: Govindraj Desai, Sekar Krishnasamy, Sumedh Acharya, Dakshalkumar Patel, Jonathan Frankel, Quoc Truong, Mario Cambron, Ravindra Patil
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Publication number: 20200340108Abstract: A method of coating particles includes dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the chamber that forms a half-cylinder, evacuating the chamber through a vacuum port in an upper portion of the chamber, rotating a paddle assembly such that a plurality of paddles orbit a drive shaft to stir the particles in the particle bed, injecting a reactant or precursor gas through a plurality of channels into the lower portion of the chamber as the paddle assembly rotates to coat the particles, and injecting the reactant or precursor gas or a purge gas through the plurality of channels at a sufficiently high velocity such that the reactant or precursor a purge gas de-agglomerates particles in the particle bed.Type: ApplicationFiled: April 22, 2020Publication date: October 29, 2020Inventors: Jonathan Frankel, Quoc Truong, Sekar Krishnasamy, Govindraj Desai, Sandip S. Desai
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Publication number: 20200338517Abstract: A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a vacuum port in an upper portion of the chamber, a chemical delivery system configured to inject a reactant or precursor gas into a lower portion of the chamber, a paddle assembly, and a motor to rotate a drive shaft of the paddle assembly. The lower portion of the chamber forms a half-cylinder. The paddle assembly includes a rotatable drive shaft extending through the chamber along the axial axis of the half cylinder, and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by the motor orbits the plurality of paddles about the drive shaft.Type: ApplicationFiled: April 22, 2020Publication date: October 29, 2020Inventors: Jonathan Frankel, Colin C. Neikirk, Pravin K. Narwankar, Quoc Truong, Govindraj Desai, Sekar Krishnasamy
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Publication number: 20200338521Abstract: A reactor for coating particles includes a stationary vacuum chamber having a lower portion that forms a half-cylinder and an upper portion to hold a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, a motor to rotate a drive shaft of the paddle assembly, a chemical delivery system to deliver a first fluid, and a first gas injection assembly to receive the first fluid from the chemical delivery system and having apertures configured to inject a first reactant or precursor gas into the lower portion of the chamber and such that the first reactant or precursor gas flows substantially tangent to a curved inner surface of the half-cylinder.Type: ApplicationFiled: April 22, 2020Publication date: October 29, 2020Inventors: Jonathan Frankel, Colin C. Neikirk, Pravin K. Narwankar, Quoc Truong, Govindraj Desai, Sekar Krishnasamy
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Patent number: 8688398Abstract: Described herein is a method and apparatus for performing calibrations on robotic components. In one embodiment, a method for performing robotic calibrations includes moving the calibrating device across a target (e.g., a wafer chuck). Next, the method includes measuring distances between light spots from the sensors and a perimeter of the target using the sensors located on the calibrating device. Next, the method includes determining a displacement of the calibrating device relative to a center of the target. Then, the method includes determining a rotation angle of the calibrating device relative to a system of coordinates of the target. Next, the method includes calibrating a robot position of the robot based on the displacement and rotation angle of the calibrating device with respect to the target.Type: GrantFiled: June 14, 2012Date of Patent: April 1, 2014Assignee: Applied Materials, Inc.Inventors: Vijay Sakhare, Sekar Krishnasamy, Mordechai Leska, Donald Foldenauer, Rinat Shimshi, Marvin L. Freeman, Jeffery Hudgens, Satish Sundar
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Publication number: 20120271590Abstract: Described herein is a method and apparatus for performing calibrations on robotic components. In one embodiment, a method for performing robotic calibrations includes moving the calibrating device across a target (e.g., a wafer chuck). Next, the method includes measuring distances between light spots from the sensors and a perimeter of the target using the sensors located on the calibrating device. Next, the method includes determining a displacement of the calibrating device relative to a center of the target. Then, the method includes determining a rotation angle of the calibrating device relative to a system of coordinates of the target. Next, the method includes calibrating a robot position of the robot based on the displacement and rotation angle of the calibrating device with respect to the target.Type: ApplicationFiled: June 14, 2012Publication date: October 25, 2012Inventors: Vijay Sakhare, Sekar Krishnasamy, Mordechai Leska, Donald Foldenauer, Rinat Shimshi, Marvin L. Freeman, Jeffery Hudgens, Satish Sundar
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Patent number: 8260461Abstract: Described herein is a method and system for performing calibrations on robotic components. In one embodiment, a method for performing robotic calibrations includes manually calibrating a center of a robot blade aligned with respect to a target. The method further includes recording a first positional value of the center of the robot blade aligned with respect to a camera. The method further includes automatically determining a second positional value of the center of the robot blade aligned with respect to the camera. The method further includes automatically recalibrating the robot blade based on an offset between the second positional value and the first positional value exceeding a tolerance offset from the first positional value.Type: GrantFiled: August 25, 2008Date of Patent: September 4, 2012Assignee: Applied Materials, Inc.Inventors: Sekar Krishnasamy, Vijay Sakhare, Mordechai Leska, Donald Foldenauer, Rinat Shimshi, Satish Sundar
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Patent number: 8224607Abstract: Described herein is a method and apparatus for performing calibrations on robotic components. In one embodiment, a method for performing robotic calibrations includes moving the calibrating device across a target (e.g., a wafer chuck). Next, the method includes measuring distances between light spots from the sensors and a perimeter of the target using the sensors located on the calibrating device. Next, the method includes determining a displacement of the calibrating device relative to a center of the target. Then, the method includes determining a rotation angle of the calibrating device relative to a system of coordinates of the target. Next, the method includes calibrating a robot position of the robot based on the displacement and rotation angle of the calibrating device with respect to the target.Type: GrantFiled: August 25, 2008Date of Patent: July 17, 2012Assignee: Applied Materials, Inc.Inventors: Vijay Sakhare, Sekar Krishnasamy, Mordechai Leska, Donald Foldenauer, Rinat Shimshi, Marvin L. Freeman, Jeffery Hudgens, Satish Sundar
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Publication number: 20090062959Abstract: Described herein is a method and apparatus for performing calibrations on robotic components. In one embodiment, a method for performing robotic calibrations includes moving the calibrating device across a target (e.g., a wafer chuck). Next, the method includes measuring distances between light spots from the sensors and a perimeter of the target using the sensors located on the calibrating device. Next, the method includes determining a displacement of the calibrating device relative to a center of the target. Then, the method includes determining a rotation angle of the calibrating device relative to a system of coordinates of the target. Next, the method includes calibrating a robot position of the robot based on the displacement and rotation angle of the calibrating device with respect to the target.Type: ApplicationFiled: August 25, 2008Publication date: March 5, 2009Inventors: Vijay Sakhare, Sekar Krishnasamy, Mordechai Leska, Donald Foldenauer, Rinat Shimshi, Marvin L. Freeman, Jeffery Hudgens