Patents by Inventor Semyon L. Zheleznyak

Semyon L. Zheleznyak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6067197
    Abstract: An echelle grating having a groove facet angle and groove periodicity such that for laser-emitted light of two different wavelengths the highest propagating diffraction order is blazed and the next higher order is non-propagating such that the intensity of each blazed order is enhanced. In an example, the 84th diffraction order of a KrF excimer laser emitting at 248.4 nm and the 108th diffraction order of an ArF excimer laser emitting at 193.3 nm will both be blazed when the groove spacing d is 0.010623 mm, corresponding to a frequency f of 94.13 grooves per mm, and the groove facet angle .theta..sub.g is about 80.degree., whereas the next higher order for each laser, i.e., the 85th and 109th orders, respectively, are non-propagating, and thus both blaze orders are enhanced.
    Type: Grant
    Filed: December 23, 1998
    Date of Patent: May 23, 2000
    Assignee: Spectronic Instruments, Inc.
    Inventors: Thomas C. Blasiak, Semyon L. Zheleznyak